Vacuum Valve Seal Compression Sensing for Leak and Wear Control
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Solution Overview
Problem
Vacuum valves used in semiconductor manufacturing face challenges in maintaining gas-tight sealing over extended periods, leading to frequent maintenance and potential leaks, which disrupt production and increase costs due to uneven pressure distribution and wear on sealing materials.
Innovation Solution
Integration of a sensor assembly with force sensors, such as strain gauge sensors, to monitor and regulate seal compression independently of pressure variations, allowing for predictive maintenance and extended maintenance intervals by measuring contact pressure and structural integrity of sealing surfaces.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If seal compression is increased to maintain gas-tight sealing, then sealing reliability is improved, but wear on sealing materials increases and service life decreases
Solution Approach 1:
The patent employs force sensors to continuously monitor the contact pressure between sealing surfaces and provides feedback to a control system. This feedback mechanism enables real-time adjustment of the valve closure position to maintain optimal seal compression, preventing both excessive compression (which causes wear) and insufficient compression (which compromises sealing). The control system adjusts the closure element's position based on measured contact pressure, ensuring the seal remains gas-tight without unnecessary wear.
2Reliability
If frequent maintenance is performed to prevent leaks, then reliability is maintained, but production downtime and costs increase
Solution Approach 1:
The patent implements a monitoring system using force sensors that detect changes in contact pressure and structural integrity of sealing surfaces before actual seal failure occurs. By performing preliminary detection of wear patterns and compression changes, the system enables predictive maintenance scheduling. The control system can adjust operational parameters or alert operators to replace sealing materials at optimal intervals, preventing leaks before they occur while avoiding unnecessary maintenance interventions that would cause production downtime.
3Reliability
If uniform pressure distribution is achieved across sealing surfaces, then sealing performance is improved, but device complexity increases due to additional control mechanisms
Solution Approach 1:
The patent divides the sealing surface monitoring into discrete measurement zones using multiple force sensors positioned at different locations between the closure element and valve seat. Each sensor monitors a specific region's contact pressure independently. The control system processes these segmented measurements and adjusts the closure element's position to achieve uniform pressure distribution across all sealing zones. This segmentation approach enables precise control of pressure distribution without requiring overly complex centralized control mechanisms.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enables optimized operation and extended service life of vacuum valve components, reducing maintenance frequency and ensuring reliable gas-tight sealing, thereby minimizing production downtime and maintenance costs.
Implementation Method 1
at least one force sensor comprising a deformation-sensitive element... a measurement signal with respect to a seal compression generated by the first and the second sealing surfaces
Implementation Method 2
force sensors, such as strain gauge sensors
Data Source
AI summary
The invention relates to a vacuum valve comprising a sensor assembly with at least one force sensor which has a deformation-sensitive element. The sensor assembly is designed such that a measurement signal relating to a compression of the seal (TO) which lies between a first and a second seal surface, said compression being produced by the first and the second seal surface, is detected by means of the sensor assembly.