Dual-Plate Vacuum Valve With Single-Drive Sealing Motion
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Solution Overview
Problem
Existing vacuum valves require separate drives for longitudinal and transverse adjustments, leading to increased complexity and potential flooding of chambers during service, especially in semiconductor processes where aggressive gases cause high wear on valve seals.
Innovation Solution
A vacuum valve design with a single drive unit that uses a blocking unit to adjust both valve plates from an open to a closed position via a longitudinal direction, utilizing preloaded springs and oblique linear guides to achieve both longitudinal and transverse movements without separate drives, allowing for efficient sealing of first and second valve openings.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If separate drives are used for longitudinal and transverse adjustments, then reliable valve plate positioning is achieved, but device complexity increases
Solution Approach 1:
The patent combines two separate drive mechanisms (longitudinal drive for opening/closing and transverse drive for sealing) into a single integrated drive unit. This single drive simultaneously performs both longitudinal displacement to move valve plates between openings and transverse displacement to press valve plates against valve seats, thereby reducing device complexity while maintaining positioning reliability.
Solution Approach 2:
The single drive unit is designed to perform multiple functions: it provides both longitudinal movement for valve plate positioning and transverse movement for sealing action. This multi-functional design eliminates the need for separate dedicated drives for each adjustment direction, simplifying the overall system while achieving reliable valve control.
2Ease of operation
If separate drives are used for longitudinal and transverse adjustments, then precise control is achieved, but the number of components increases
Solution Approach 1:
The patent merges longitudinal and transverse drive functions into one integrated drive unit, reducing the number of components from two separate drives to a single unified system. This consolidation maintains precise control capability while simplifying the component structure and reducing system complexity.
3Ease of operation
If conventional linear guides are used, then smooth running and low play are achieved, but the structure becomes more complex
Solution Approach 1:
The patent combines the longitudinal linear guide and transverse linear guide into an integrated guide structure that supports the single drive unit. This unified guide system provides smooth running and low play for both longitudinal and transverse movements simultaneously, reducing structural complexity compared to having separate guide systems for each direction.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution simplifies the drive mechanism, reduces the need for separate drives, and minimizes chamber flooding during service, enabling continuous production by allowing one actuator to control both valve plates' positions, thus enhancing operational efficiency and reducing maintenance interruptions.
Implementation Method 1
at least one spring which acts between the transmission unit and the carrier piece and which drives the carrier piece during the adjustment of the transmission unit with respect to the base body from the starting position as far as the intermediate position
Data Source
AI summary
A vacuum valve including a housing, a closure unit with two valve plates, supported by a valve rod, and a carrier piece connected rigidly to the valve rod, a transmission unit, a drive unit with a base body and an actuator, a longitudinal linear guide, by which the transmission unit is guided parallel to a longitudinal adjusting direction relative to the base body, an oblique linear guide, by which the carrier piece is guided parallel to an oblique adjusting direction relative to the transmission unit, a spring acting between the transmission unit and the carrier piece, a stop device which blocks adjustment of the closure unit in the longitudinal adjusting direction in a middle position thereof, and a blocking unit, which in the locked state blocks an adjustment of the closure unit situated in the middle position counter to the longitudinal adjusting direction and, in the release state, allows adjustment.