Sliding-Guide Vacuum Valve for Low-Particle Gas-Tight Sealing

The patent introduces a dynamic closing movement where the closure element is tilted during the closing process rather than moving purely linearly. This dynamic approach allows the closure element to be pressed onto the valve seat at an angle, reducing shear forces and friction while maintaining sealing reliability. The tilting movement transforms the closing action from a direct sliding motion to a more controlled angular approach.

The patent adds a rotational dimension to the closing movement by tilting the closure element. Instead of moving only in the linear direction toward the valve seat, the closure element rotates during closing, creating a two-dimensional movement path. This dimensional change reduces the harmful shear forces and friction that occur in pure linear sliding while still achieving gas-tight closure.

The patent uses a dynamic tilting mechanism that can be implemented with relatively simple mechanical components. The tilting action is achieved through guide elements and support surfaces that are straightforward to manufacture, yet they provide precise control over the closing movement. The guide elements ensure the closure element follows the correct angular path, maintaining control precision without requiring complex drive mechanisms.

The patent introduces guide elements as intermediary components between the linear drive and the closure element. These guide elements mediate the motion, converting simple linear movement into the required tilting closing motion. The guide surfaces and support elements act as intermediaries that provide precise control while keeping the overall drive system relatively simple and easy to manufacture.