Adjustable-Stroke Vacuum Pressure Valve for Lower Pipe Pressure Loss
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Solution Overview
Problem
Conventional vacuum pressure proportional control valves lack a mechanism to adjust the full stroke, leading to deteriorated exhaust characteristics due to increased pressure loss in longer pipes and varying pumping power, which affects the efficiency of semiconductor manufacturing equipment.
Innovation Solution
A vacuum pressure proportional control valve with a piston and stopper member configuration, allowing for manual adjustment of the full stroke via an adjusting unit, to adapt to changes in pipe length and vacuum pump power, thereby improving exhaust characteristics.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If the pipe length between the reaction vessel and vacuum pump is increased, then the vacuum pump can be installed in various locations according to layout requirements, but the pressure loss in the pipe increases and exhaust characteristics deteriorate
Solution Approach 1:
The patent applies the dynamics principle by making the valve stroke adjustable rather than fixed. The stopper member can be repositioned along the piston rod to change the full stroke length, allowing the valve to adapt to different pipe lengths and pumping conditions. This dynamic adjustment capability enables the system to maintain optimal exhaust characteristics regardless of installation location or pipe configuration.
2Productivity
If a vacuum pump with higher pumping power is used, then the exhaust time can be shortened to enhance productivity, but the exhaust characteristics still deteriorate if pipe pressure loss is not improved
Solution Approach 1:
The patent applies parameter changes by adjusting the valve stroke length to match the system's pressure loss characteristics. When using high-power vacuum pumps with long pipes, the full stroke can be increased to allow greater valve opening, reducing flow resistance and compensating for pipe pressure loss. This parameter adjustment ensures that the high pumping power is effectively utilized without being undermined by excessive pressure losses.
3Device complexity
If the valve full stroke is fixed, then the valve structure is simple, but the exhaust characteristics cannot be adjusted for different pipe lengths or pumping powers
Solution Approach 1:
The patent implements dynamics by transforming the fixed stopper into an adjustable stopper member that can be repositioned along the piston rod. This allows the full stroke to be dynamically adjusted according to different operating conditions (pipe length, pumping power) while maintaining a relatively simple overall valve structure. The adjustment mechanism adds minimal complexity but provides significant adaptability improvement.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The valve can change exhaust characteristics by adjusting the full stroke, reducing pressure loss and enhancing the efficiency of gas discharge from the reaction vessel, regardless of pipe length or vacuum pump power.
Implementation Method 1
a piston (32) housed in the piston chamber (31) so that the piston (32) makes reciprocal linear movement
Implementation Method 2
a vacuum pressure proportional control valve to be placed on a pipe (103) connecting a reaction vessel (102) and a vacuum pump (101) to control vacuum pressure in the reaction vessel (102)
Data Source
AI summary
A vacuum pressure proportional control valve placed on a pipe connecting between a reaction vessel and a vacuum pump to control the vacuum pressure in the reaction vessel includes a cylinder provided with a piston chamber, a piston housed in the piston chamber so as to make reciprocal linear movement, a valve seat surface, and a valve element which contacts with or separates from the valve seat surface according to the movement of the piston. A stopper member is provided in the cylinder so that a leading end portion of the stopper member is placed in the piston chamber. The stopper member is configured to move the piston back and forth in a moving direction of the piston by use of an adjusting unit to thereby adjust the position of the leading end portion.