Temperature-Sensed Vacuum Valve Sealing for Predictive Maintenance
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Solution Overview
Problem
Vacuum valves used in semiconductor production face challenges in maintaining reliable gas-tight sealing and efficient maintenance, leading to frequent downtime and increased costs due to precautionary replacement of valve components and unpredictable sealing quality.
Innovation Solution
Incorporating a temperature sensor arrangement within the vacuum valve to monitor thermal influences and adjust the drive unit control, allowing for predictive maintenance and improved sealing reliability by detecting temperature-related changes and adapting the valve actuation accordingly.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If vacuum valves are operated without temperature monitoring, then the device complexity is reduced, but the reliability of gas-tight sealing deteriorates due to unpredictable thermal influences on sealing quality
Solution Approach 1:
The temperature sensor arrangement monitors thermal conditions before they cause sealing failures, allowing predictive maintenance and adjustment of drive unit control parameters to prevent sealing quality deterioration
Solution Approach 2:
The temperature sensor provides continuous feedback on thermal influences within the vacuum valve, enabling real-time adjustment of drive unit control to maintain optimal sealing conditions and predict when maintenance is needed
2Reliability
If vacuum valves are maintained on a precautionary basis, then the reliability is improved, but the productivity deteriorates due to frequent downtime for valve component replacement
Solution Approach 1:
The temperature sensor detects thermal influences and wear indicators before they lead to sealing failures, allowing maintenance to be scheduled based on actual condition rather than fixed intervals, thus reducing unnecessary downtime
Solution Approach 2:
The temperature monitoring system enables the valve to effectively monitor its own condition and signal when maintenance is needed, transitioning from calendar-based preventive maintenance to condition-based maintenance
3Reliability
If the drive unit control is adjusted to compensate for thermal influences, then the sealing quality is improved, but the device complexity increases due to additional control mechanisms
Solution Approach 1:
The temperature sensor arrangement provides feedback on thermal conditions, enabling the drive unit control to be adjusted dynamically to compensate for thermal expansion and maintain optimal sealing pressure without over-complicating the control system
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The temperature sensor system enables more efficient maintenance planning, reduces downtime, and ensures consistent sealing quality by monitoring thermal conditions and adjusting the valve operation, thereby extending the service life of valve components and maintaining process integrity.
Implementation Method 1
Incorporating a temperature sensor arrangement within the vacuum valve to monitor thermal influences
Data Source
AI summary
Disclosed is a vacuum valve having a valve seat, which has a valve opening, defining an opening axis, and a first sealing surface, a valve closure having a second sealing surface corresponding to the first sealing surface, a drive unit coupled to the valve closure, which can be moved from an open position, in which the valve closure and the valve seat do not contact each other, to a closed position, in which there is a sealing contact between the first sealing surface and the second sealing surface by a seal there between, and the valve opening is sealed gastight as a result. The vacuum valve has at least one temperature sensor, where the temperature sensor is designed and arranged such that, from the temperature sensor, a measurement signal representing thermal information in respect of at least one part of the vacuum valve can be detected.