Vacuum Valve Transverse Guide Mechanism
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Solution Overview
Problem
Existing vacuum valves, particularly L-valves, face issues with precise and parallel adjustment of the valve plate in the transverse direction, leading to elevated loading of the seal and inefficient force transmission, especially when differential pressures act on the valve plate from two directions.
Innovation Solution
The design incorporates a bearing unit and guide unit outside the vacuum region, allowing the valve rod to be displaced in both longitudinal and transverse directions, with both drive devices located outside the vacuum region to absorb differential pressures, enabling improved force transmission and precise alignment of the valve plate.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If the valve plate is adjusted in the transverse direction by tilting the valve rod, then the valve plate can be moved from intermediate position to closed position, but the adjustment is not performed exactly and in parallel, leading to elevated loading of the seal
Solution Approach 1:
A guide unit is introduced as an intermediary component between the valve rod and the valve plate. The guide unit ensures that the valve rod is displaced exactly in parallel in the transverse direction, preventing the tilting motion that caused imprecise adjustment. This mediator component transfers the driving force while maintaining precise parallel motion, thereby reducing seal loading.
Solution Approach 2:
The adjustment mechanism is segmented into distinct functional components: the valve rod for longitudinal displacement, the guide unit for ensuring precise parallel transverse displacement, and the valve plate for sealing. This segmentation allows each component to perform its specific function optimally, with the guide unit specifically addressing the precision issue.
2Ease of operation
If the valve rod is tilted for transverse adjustment, then the valve plate can be positioned, but the force transmission is inefficient, especially under differential pressures from two directions
Solution Approach 1:
The guide unit serves as a force transmission intermediary that efficiently transfers the driving force from the longitudinal drive device and transverse drive device to the valve plate. By ensuring pure parallel displacement without tilting, the guide unit optimizes force transmission, particularly when differential pressures act from two directions, as the force path becomes more direct and efficient.
3Reliability
If the drive devices are located inside the vacuum region, then the valve can operate in vacuum, but the construction becomes more complex and serviceability is reduced
Solution Approach 1:
The drive devices (longitudinal drive device and transverse drive device) are extracted from the vacuum region and relocated to the outer side of the vacuum chamber. The valve rod extends through the vacuum chamber wall to connect the external drive devices with the valve plate inside the vacuum region. This extraction simplifies the construction and improves serviceability while maintaining vacuum operation capability through proper sealing at the wall penetration point.
Data Source
AI summary
A vacuum valve including a wall (1) having a valve opening (2) surrounded by a valve seat (4), at least one valve plate (5), which is disposed in a vacuum region of the vacuum valve and can be moved from an open position in a longitudinal direction (6) into an intermediate position, and from the intermediate position in a transverse direction (7) perpendicular to the longitudinal direction (6) into a closed position. At least one valve rod (12), which carries the valve plate (5), is led through the vacuum region of the vacuum valve and can be displaced relative to the wall (1) in the longitudinal direction (6) located parallel to the longitudinal axis (14) of the valve rod (12), and also in the transverse direction (7). Longitudinal and transverse drive devices (15, 15′, 16, 16′) are disposed outside of the vacuum region of the vacuum valve, and the drive devices can displace the valve rod (12) in the longitudinal direction (6) and in the transverse direction (7) in order to adjust the valve plate (5). A bearing unit (17, 17′) is provided, which is located outside of the vacuum region of the vacuum valve and rigidly connected to the wall (1) and by which a guide unit (20, 20′) that displaceably guides the valve rod (12) in the longitudinal direction (6) is guided displaceably in the transverse direction (7).