Vacuum Valve Speed Control for Vibration Suppression
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Solution Overview
Problem
Vacuum valves in semiconductor manufacturing apparatuses experience vibration during operation, leading to contamination and reduced productivity due to the need to slow down operation speeds to suppress vibration, which affects the service life and maintainability of the apparatus.
Innovation Solution
A control method for vacuum valves that uses a vibration sensor and a computing unit to regulate the operation speed by setting threshold values for vibration amplitude, slowing down the valve body when excessive vibration is detected and returning to normal speed when within acceptable limits, while also tracking the frequency of such events to determine part replacement needs.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the opening and closing speed of the vacuum valve is increased to improve productivity, then the operating speed is improved, but the vibration becomes larger causing foreign matter to come off and contaminate the chamber
Solution Approach 1:
The patent applies dynamics by making the valve driving speed variable rather than constant. The control unit dynamically adjusts the driving speed based on real-time vibration feedback from the vibration sensor. When vibration exceeds the threshold, the speed is reduced to suppress vibration; when vibration is within acceptable limits, the speed is increased to maintain productivity. This dynamic adjustment resolves the contradiction between productivity and vibration control.
Solution Approach 2:
The patent implements a feedback control mechanism where the vibration sensor continuously monitors valve vibration and feeds this information back to the control unit. The control unit processes the vibration signal and adjusts the driving speed accordingly. This closed-loop feedback system enables real-time optimization of the valve operation, maintaining high productivity while suppressing vibration-induced contamination.
2Object-generated harmful factors
If the valve driving speed is reduced to suppress vibration and prevent foreign matter contamination, then the vibration is suppressed, but the operating time is prolonged reducing productivity
Solution Approach 1:
The system dynamically adjusts the valve driving speed based on actual vibration conditions rather than maintaining a consistently low speed. The control unit increases speed when vibration is within acceptable limits and only reduces speed when vibration exceeds the threshold. This dynamic approach minimizes the impact on productivity while effectively suppressing vibration and preventing foreign matter contamination.
Solution Approach 2:
The patent changes the operating parameters (driving speed) based on the vibration amplitude. By setting a threshold value and adjusting the speed parameter dynamically according to whether vibration exceeds this threshold, the system optimizes the balance between vibration suppression and productivity maintenance.
3Object-generated harmful factors
If the vibration threshold is set low to suppress vibration effectively, then the vibration control is improved, but the valve must operate at lower speeds more frequently reducing productivity
Solution Approach 1:
The patent optimizes the threshold parameter to achieve the best balance between vibration suppression and productivity. By carefully selecting the threshold value and dynamically adjusting the driving speed based on whether vibration exceeds this threshold, the system maximizes the time spent operating at high speed while still effectively controlling vibration when necessary.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method effectively suppresses vibration within allowable ranges, delaying part deterioration and extending the service life of vacuum valves without significantly prolonging opening and closing operations, thus reducing substrate contamination.
Implementation Method 1
a vibration sensor for detecting vibration of the valve body
Data Source
AI summary
A method of controlling a vacuum valve includes instructing an actuator to reduce an operating speed so that an amplitude falls within the first threshold value when the amplitude obtained from a vibration sensor exceeds a first threshold value and a second threshold value. The method also includes instructing the actuator to return to the operating speed when the amplitude obtained from the vibration sensor is below the second threshold value.