Vacuum Chamber Venting with Mass Flow Control for Clean Inspection
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Solution Overview
Problem
Existing flow-supply structures for vacuum chambers in inspection systems, such as electron beam inspection systems, lack adequate control over venting flow, leading to particle contamination and cross-component damage due to unregulated pressure changes and lack of flow conditioning capabilities, which are insufficient for high or ultra-high vacuum requirements.
Innovation Solution
The implementation of a system with a mass flow controller and vent valve configuration that provides a controlled, efficient venting sequence by regulating gas flow and pressure, using a pre-defined resuspension-suppressed venting profile to limit particle resuspension and incorporate additional gas treatment modules for various flow conditioning operations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If existing flow-supply structures are used for vacuum chambers, then the system is simpler and easier to manufacture, but particle contamination and cross-component damage occur due to unregulated pressure changes and lack of flow conditioning
Solution Approach 1:
A mass flow controller is introduced as an intermediary device between the gas source and the vacuum chamber. This mediator regulates the gas flow rate and pressure during venting operations, preventing particle resuspension and contamination while maintaining system cleanliness without requiring complete redesign of the flow-supply structure
Solution Approach 2:
The patent applies parameter changes by dynamically adjusting the mass flow rate and pressure parameters during the venting process. By controlling these parameters through the mass flow controller, the system achieves clean venting operations with particle resuspension rates limited to less than 0.1%, resolving the contradiction between simplicity and cleanliness
2Productivity
If venting is performed without mass flow control, then the venting process is faster and more direct, but unregulated pressure changes cause particle resuspension and cross-component damage
Solution Approach 1:
The system employs dynamic control of gas flow parameters through the mass flow controller during venting operations. The controller adjusts the flow rate in real-time based on chamber pressure conditions, enabling both efficient venting and prevention of particle contamination by adapting the venting profile to current system state
Solution Approach 2:
The venting system incorporates feedback control where the mass flow controller monitors chamber pressure and adjusts gas flow accordingly. This feedback mechanism ensures that venting proceeds efficiently while maintaining parameters that prevent particle resuspension, thus resolving the contradiction between venting speed and contamination control
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration ensures clean and efficient venting, reducing particle contamination and cross-component damage, while maintaining the performance of inspection systems by regulating gas flow and pressure, thus enhancing the cleanliness and efficiency of venting and flow conditioning operations.
Implementation Method 1
a mass flow controller coupled to the chamber on a first side of the mass flow controller and to the vent valve on a second side of the mass flow controller
Implementation Method 2
a vent valve configured to provide a gas to the mass flow controller
Data Source
AI summary
Systems and structures for venting and flow conditioning operations in charged particle beam systems. In some embodiments, a system may include a chamber configured to provide a vacuum environment; a vent valve; and a mass flow controller coupled to the chamber on a first side of the mass flow controller and to the vent valve on a second side of the mass flow controller.