Valve Assembly Flow Control via Sensor Feedback
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Solution Overview
Problem
Current Mass Flow Controllers (MFCs) used in semiconductor wafer manufacturing are expensive and often redundant, as they include processor-based control units and advanced diagnostics systems that exceed the needs of manufacturers, leading to increased costs and inefficiencies due to redundant hardware and services.
Innovation Solution
A valve assembly integrating a stand-alone valve with a sensor chip package and a controller interface that uses measured parametric values to adjust valve stroke, allowing for precise control of fluid flow rates at multiple set points and during shutdowns and restarts, without the need for redundant processor-based control units and sensors.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If current state of the art MFCs are equipped with processor based control units, a multitude of sensors, and an advanced diagnostics system, then flow rate control accuracy is improved, but device complexity and cost increase significantly
Solution Approach 1:
The patent extracts and removes the redundant processor-based control unit, multiple sensors, and advanced diagnostics system from the MFC device. Only the essential valve assembly and single sensor are retained, eliminating unnecessary components while preserving flow rate control accuracy through simplified control logic implemented in the valve assembly itself.
Solution Approach 2:
The valve assembly is designed to autonomously control flow rate without requiring an external processor-based control unit. The single sensor provides feedback to the valve assembly, which self-regulates the flow rate based on the measured parameters, eliminating the need for complex external control systems.
2Manufacturing precision
If current state of the art MFCs are equipped with processor based control units, a multitude of sensors, and an advanced diagnostics system, then flow rate control accuracy is improved, but manufacturing cost increases beyond manufacturer's needs
Solution Approach 1:
The patent removes expensive components including the processor-based control unit, multiple sensors, and advanced diagnostics system, retaining only the essential valve assembly and single sensor. This extraction of unnecessary components significantly reduces manufacturing cost while maintaining adequate flow rate control accuracy for semiconductor manufacturing applications.
Solution Approach 2:
The patent employs a simplified valve assembly design that uses fewer, less expensive components. The single sensor and basic valve mechanism replace costly processor-based systems, providing a cost-effective solution that meets the precision requirements without the excessive cost of high-end MFCs.
3Device complexity
If a simplified valve assembly with single sensor is used, then device complexity and cost are reduced, but flow rate control precision may be compromised
Solution Approach 1:
The single sensor in the valve assembly provides continuous feedback on flow rate parameters. This feedback is processed by the valve assembly's control logic, which automatically adjusts the valve position to maintain the desired flow rate, ensuring precision control despite the simplified hardware configuration.
Solution Approach 2:
The valve assembly autonomously maintains flow rate precision through self-regulation based on single sensor feedback. The system automatically compensates for variations in flow conditions without requiring external processor-based control, maintaining manufacturing precision through intelligent self-control.
Data Source
AI summary
A valve assembly for controlling fluid flow rate comprising a valve block, a valve, a sensor chip package, and a controller interface. The valve block having an upstream reservoir, a downstream reservoir, and a valve seat for communicating fluid from an upstream location to a downstream location. The valve having a moveable member. The sensor chip package having at least one sensor coupled with the valve. The controller interface is communicable coupled to a control unit, the valve, and the sensor chip package. The controller interface sends at least one parametric value provided by the sensor chip package to the control unit. The controller interface receives a control signal used to adjust valve stroke of the valve. The control signal of the valve is determined based on the at least one measured parametric value and at least one other parametric value provided by a fluid processing system.