Valve Block Layout for Minimal Deadlegs in Purge Paths
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Solution Overview
Problem
Existing electronic device fabrication systems suffer from reduced purging efficiency due to non-impinged deadlegs, requiring longer purge times and increased gas consumption, as the geometry of conduits and ports prevents full impingement of purge gas, leaving residual chemicals on wetted surfaces.
Innovation Solution
A valve block design with valves oriented 90 degrees apart within a single housing, ensuring full impingement on deadlegs and minimizing the vent path length, allowing for efficient purging with reduced gas usage and shorter drying times.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If conventional valve block design with non-impinged deadlegs is used, then the system can maintain chemical flow paths, but purging efficiency decreases and purge time increases
Solution Approach 1:
The valve block is segmented into multiple chambers (first chamber, second chamber, third chamber) with distinct functions. Each chamber handles specific flow paths, allowing purge gas to be directed to specific areas. The segmentation enables the purge path to avoid deadlegs by routing through defined channels rather than allowing gas to stagnate in undefined geometries.
Solution Approach 2:
The invention introduces a vertical dimension to the flow path by routing purge gas through the vent port at the top of the valve block, down through the third chamber, and out through the outlet port. This vertical routing approach eliminates horizontal deadlegs that would trap chemicals, ensuring complete purging of all wetted surfaces.
2Productivity
If conventional valve block design is used, then the system structure is simple, but gas consumption increases due to extended purging requirements
Solution Approach 1:
By segmenting the valve block into functional chambers with defined flow paths, purge gas is efficiently directed through all necessary areas without wasting gas in deadlegs. The segmented design ensures every portion of the gas path has a purpose, eliminating unnecessary gas consumption.
Solution Approach 2:
The continuous flow path from inlet through the vent port down to the outlet ensures that purge gas continuously contacts all wetted surfaces without interruption or stagnation. This continuous action eliminates the need for extended purging periods and additional gas consumption.
3Productivity
If conventional valve block design with extended vent path is used, then the system can accommodate standard valve configurations, but the wetted conduit surface area increases
Solution Approach 1:
The vent path is routed vertically through the third chamber rather than extending horizontally. This vertical routing minimizes the surface area of conduits that become wetted during operation, reducing the area that requires purging and drying while maintaining full chemical flow capability.
Solution Approach 2:
The unnecessary horizontal extensions and deadleg-prone geometries are extracted from the design. Only the essential vertical flow path through the chambers is retained, eliminating excess wetted surface area while preserving all necessary chemical transport functions.
Data Source
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AI summary
In one respect, the invention is an improved valve block design having minimal or no deadlegs that improves the efficiency of a system purge process. In another respect, the invention is a system incorporating said improved valve block design.