Valve Body Arrangement with Shared Plug Diaphragms
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Solution Overview
Problem
Existing back-suction valve designs for process fluids in semiconductor wafer production require separate components and drives for closing fluid channels and sucking back functions, increasing design complexity and component redundancy.
Innovation Solution
A valve unit and suction unit arrangement with a shared valve body and plug diaphragms that structurally decouples the closing and sucking back functions, allowing for standardized components and drives, and utilizing identical plug diaphragms for both functions.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If separate components and drives are used for closing fluid channels and sucking back functions, then the reliability of each function is improved, but the device complexity and design effort increase
Solution Approach 1:
The patent applies universality by designing the plug diaphragm as a multi-functional component that performs both closing (valve) function and sucking back function. The same plug diaphragm structure is used in both the valve unit and suction unit, eliminating the need for separate components and reducing design complexity while maintaining functional reliability through standardized design
2Ease of manufacture
If separate components are used for valve function and suction function, then the ease of manufacture for specialized parts is improved, but the quantity of components and redundancy increase
Solution Approach 1:
The plug diaphragm is designed as a universal component that serves dual purposes: as a valve element for closing fluid channels and as a suction element for back-suction functionality. This reduces the total quantity of components needed while maintaining ease of manufacture through standardized production of identical plug diaphragms for both functions
Solution Approach 2:
The patent merges the valve function and suction function into a single integrated arrangement with a common valve body housing both the valve unit and suction unit. This consolidation reduces component quantity and redundancy while maintaining manufacturing efficiency through shared structural elements
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design simplifies the design effort by enabling the use of identical components and drives for different functions, reducing redundancy and complexity while maintaining efficient fluid handling and suction capabilities.
Implementation Method 1
The valve unit comprises a first plug diaphragm, wherein the first plug diaphragm, when pressed onto the valve seat of the first chamber, closes a connection between the first channel section and the second channel section
Implementation Method 2
The suction unit comprises a second plug diaphragm, wherein the second plug diaphragm sucks back a process fluid located in the third channel section towards the second chamber when it is retracted within the second chamber
Data Source
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AI summary
Arrangement (2) comprising a valve unit (4), a return suction unit (6) and a valve body (8), wherein the valve body (8) comprises a first channel section leading into a first chamber with a valve seat; wherein the valve body (8) comprises a second channel section connecting the first chamber to a second chamber; wherein the valve body (8) comprises a third channel section leading away from the second chamber; wherein the valve unit (4) comprises a first actuating element; wherein, when pressed onto the valve seat of the first chamber, the first actuating element closes a connection between the first channel section and the second channel section;and wherein the return suction unit (6) comprises a second actuating element, wherein the second actuating element, when withdrawn within the second chamber, draws back a fluid located in the third channel section towards the second chamber when the connection between the first channel section and the second channel section is closed.