Valve Disk Segmentation for Pressure Differential Management
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Solution Overview
Problem
Existing vacuum valves in semiconductor production are complex, prone to contamination, and experience increased seal wear due to differential pressure fluctuations, making them difficult to maintain and requiring robust structures to withstand high pressure loads.
Innovation Solution
A two-part valve disk design with an outer and inner disk portion forming a radial seal, where the inner disk is axially movable and supported directly or indirectly on the valve housing, decoupling it from the outer disk and eliminating axial support on the seal, thus using two radial seals to manage pressure differentials and reduce stress on the seals and drive components.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Strength
If a robust structure is used to withstand high pressure loads, then the valve can handle differential pressures, but the device complexity and structure robustness increase
Solution Approach 1:
The valve disk is divided into an outer disk portion and an inner disk portion that are axially movable relative to each other. This segmentation allows the seal to be decoupled from axial support mechanisms, reducing the robustness requirements of the overall structure while maintaining pressure withstanding capability through the radial seal arrangement.
2Reliability
If axial support mechanisms are added to eliminate seal wear, then seal reliability improves, but the device complexity increases
Solution Approach 1:
The axial support function is extracted from the seal assembly. The inner disk portion is made axially movable and is supported directly or indirectly on the valve housing rather than through the seal. This eliminates axial support forces acting on the seal, reducing seal wear without requiring complex axial support mechanisms integrated with the seal.
Solution Approach 2:
The inner disk portion acts as an intermediary element between the pressure differential and the outer disk portion. It is axially movable and supported on the valve housing, serving as a mediator that decouples the axial support function from the seal, allowing the seal to focus solely on radial sealing without bearing axial loads.
3Ease of manufacture
If the valve structure is simplified to reduce complexity, then ease of manufacture improves, but the capability to withstand high differential pressures may be compromised
Solution Approach 1:
The segmented valve disk design with axially movable inner and outer portions allows for a simpler overall structure compared to complex axial support mechanisms. The segmentation enables the seal to be decoupled from axial loads, simplifying the structure while maintaining the capability to withstand high differential pressures through the radial seal arrangement and pressure equalization.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design results in a compact, simple structure with low seal wear and reduced exposure to differential pressures, allowing the valve to withstand high pressures and fluctuations while maintaining gastightness without complex axial support mechanisms.
Implementation Method 1
via an intervening first seal, a radially sealing contact is formed between the outer disk portion and the valve seat; between the inner disk portion and the outer disk portion, via an intervening second seal, a radially sealing contact is formed
Data Source
AI summary
A valve for the gastight interruption of a flow path is disclosed. A valve housing includes a first opening and a valve seat. A valve disk includes an inner disk portion, which is linearly movable relative to an outer disk portion so that, in a closed setting, a pressure differential acts substantially upon the movable inner disk portion, which is supported on the valve housing. The valve seat has a radially inward pointing first inner face and the outer disk portion has a radially outward pointing first outer face, wherein in the closed setting there exists a radial sealing contact with the first inner face. The outer disk portion has a radially inward pointing second inner face and the inner disk portion has a radially outward pointing second outer face, having a radially sealing contact with the second inner face.