Valve Element Concave Resin Coating for Fluid Control Sealing
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Solution Overview
Problem
Existing fluid control valves in mass flow controllers face issues with uneven resin coating surfaces leading to inadequate sealing and durability due to the thinness and low hardness of the resin film, causing internal leakage and difficulty in maintaining long-term sealing properties.
Innovation Solution
A valve element with a concave portion on its surface, where the resin coating is applied, improves flatness and uniformity, reducing thermal expansion and elastic deformation, and includes a polish limiting guide to prevent side-cutting during polishing, ensuring consistent film thickness and long-term sealing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a resin coating is applied over the entire lower surface of the diaphragm valve body to improve sealing property, then the sealing property is improved, but the thin film peels off and film thickness becomes non-uniform due to side cutting during polishing
Solution Approach 1:
The resin coating is applied selectively only in the concave portion (sealing surface area) rather than over the entire lower surface of the diaphragm valve body. This localized coating approach ensures that the resin coating is concentrated where sealing is needed, while avoiding areas that would be affected by polishing side cutting, thus maintaining both sealing property and film thickness uniformity.
2Manufacturing precision
If plane-lapping is performed to polish the resin coating surface to ensure flatness, then surface flatness is improved, but the thin film peels off due to side cutting
Solution Approach 1:
The resin coating is confined to the concave portion where it is needed for sealing, rather than being applied over the entire surface. This localization ensures that the polishing process can effectively achieve surface flatness in the sealing area without causing side cutting that would peel the film from the valve body, thus maintaining both flatness and adhesion.
3Reliability
If a thick resin coating is applied to ensure sealing property, then sealing is improved, but thermal expansion becomes significant affecting valve performance
Solution Approach 1:
The resin coating is applied only in the concave portion (sealing surface area) rather than over the entire valve body surface. This localized application minimizes the total volume of resin material, thereby reducing thermal expansion effects while maintaining adequate sealing property in the critical sealing zone where the coating is present.
Data Source
AI summary
The present invention is directed a valve element which is intended to improve a sealing property at a time of closing a fluid control valve and to improve stability while maintaining durability for a long time period, wherein the valve element constitutes one of a valve seat surface or a seating surface and the valve element includes a concave portion formed in an opposing surface facing the valve seat surface and a resin coating film which is formed in the concave portion and contacts the valve seat surface.