Valve Leakage Detection in Fluid Supply Lines Using Temperature
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Solution Overview
Problem
Existing substrate processing apparatuses face challenges in detecting fluid leakage in multiple opening/closing valves, which is labor-intensive and often requires replacing all valves when leakage is suspected, even if it occurs in only a few.
Innovation Solution
A fluid supply system with temperature measurers to detect fluid leakage by measuring temperature changes in opening/closing valves, determining leakage based on internal pressure differentials, and a control device to identify specific leaking valves.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If multiple opening/closing valves are provided in the pipe for fluid flow control, then the fluid flow control capability is improved, but the difficulty of detecting and measuring leakage increases
Solution Approach 1:
The patent divides the pipe system into multiple segments, each with its own opening/closing valve and temperature measurer. This segmentation allows independent monitoring of each valve section, making leakage detection more efficient without compromising the overall fluid flow control capability of the multi-valve system.
Solution Approach 2:
The patent introduces temperature measurers as intermediary devices that detect temperature changes caused by fluid leakage. These intermediaries translate the invisible leakage process into measurable temperature signals, solving the detection difficulty while maintaining the multi-valve control system.
2Measurement precision
If temperature measurers are provided to detect fluid leakage, then the measurement precision of leakage detection is improved, but the device complexity increases
Solution Approach 1:
The temperature measurers monitor temperature changes that occur naturally during leakage without requiring additional active sensing mechanisms. The system uses the inherent thermal properties of the leaking fluid to generate detectable signals, improving measurement precision while minimizing added complexity.
Solution Approach 2:
The patent replaces complex mechanical leakage detection methods with thermal field-based temperature measurement. This substitution uses thermal energy detection instead of mechanical sensing, achieving higher measurement precision with simpler device architecture.
3Reliability
If all opening/closing valves are replaced when leakage is suspected, then the reliability of the fluid supply system is improved, but the loss of time and productivity increases
Solution Approach 1:
The temperature measurers provide real-time feedback on the actual condition of each valve by detecting temperature changes indicative of leakage. This feedback enables selective replacement of only the faulty valves rather than blanket replacement of all valves, maintaining system reliability while significantly reducing downtime and productivity loss.
Solution Approach 2:
The patent implements preliminary leakage detection through temperature monitoring before actual leakage occurs or escalates. By detecting early temperature anomalies, the system allows for planned, selective valve replacement rather than emergency blanket replacement, improving both reliability maintenance and productivity preservation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Efficiently identifies and alerts operators to specific leaking valves, reducing unnecessary valve replacements and maintaining apparatus functionality.
Implementation Method 1
a plurality of temperature measurers provided to correspond respectively to the plurality of opening/closing valves, each of the plurality of temperature measurers being configured to measure a temperature of at least one of a member located on a downstream side of a corresponding opening/closing valve among the plurality of opening/closing valves or an inner side of the member
Implementation Method 2
in a state in which the inflow passage is filled with a pressurized fluid so that an internal pressure of the inflow passage becomes higher than an internal pressure of the outflow passage as the corresponding opening/closing valve is closed to cause the inflow passage is blocked from the outflow passage by the valve body
Data Source
AI summary
A fluid supply system includes: a pipe; a fluid supplier for supplying a fluid to the pipe; opening/closing valves provided in the pipe, each of which having an inflow passage, an outflow passage, and a valve body configured to cause the inflow passage to be in communication with or be blocked from the outflow passage; temperature measurers for measuring a temperature of at least one of a member located downstream of a corresponding opening/closing valve or an inner side of the member; and a leakage determiner for determining whether or not leakage of the fluid occurs in each opening/closing valve. The leakage determiner determines whether or not the leakage of the fluid occurs based on a temperature measured by a corresponding temperature measurer in a state where the inflow passage is filled with a pressurized fluid and an internal pressure of the inflow passage becomes higher than that of the outflow passage.