Compact Valve Locking Mechanism with Rotating Plate
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Solution Overview
Problem
Existing valve locking mechanisms for semiconductor manufacturing gas supply systems are bulky, interfere with adjacent units, and complicate handle operation, while also being costly and prone to misoperation.
Innovation Solution
A compact valve design with a locking mechanism featuring a rotatable locking plate integrated into the valve body, using a cutout stepped face and rotary plate to prevent horizontal projection and simplify the structure, allowing locking only at full-open or full-close positions, and providing visual indication of the valve state.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a conventional locking mechanism with a locking hole is used, then the handle can be locked in full-close state, but the mechanism projects horizontally from the valve body and interferes with adjacent valve units in compact integrated valve arrangements
Solution Approach 1:
The locking plate is rotated from a horizontal projection configuration to a vertical rotation configuration. The locking plate rotates within the upper surface area of the valve body, confined to an area almost along the radial direction of the cylindrical enclosure, eliminating horizontal projection and interference with adjacent units while maintaining the locking function.
2Reliability
If a complex locking mechanism with multiple components is used, then reliable locking can be achieved, but the manufacturing cost increases and the structure becomes complicated
Solution Approach 1:
The locking mechanism is integrated into the valve body structure. The locking plate is rotatably attached to the valve body within its upper surface area, merging the locking function with the existing valve structure rather than adding separate external components, thereby reducing overall complexity while maintaining reliability.
3Reliability
If a locking mechanism with a locking hole is used, then the handle can be locked, but the handle operation becomes complicated and misoperation can occur
Solution Approach 1:
The locking function is localized to specific positions through the rotary plate with a cutout. The locking plate can only be locked when aligned with the cutout, which is positioned to correspond with either the full-open or full-close state of the valve. This localized locking approach prevents misoperation by allowing locking only at the correct positions while maintaining simple handle operation.
4Ease of operation
If the locking plate rotation area is large, then the locking mechanism has sufficient clearance, but the housing space increases and the valve becomes bulky
Solution Approach 1:
The locking plate rotation is confined to the vertical dimension within the upper surface area of the valve body, specifically along the radial direction of the cylindrical enclosure. This vertical confinement provides sufficient rotation clearance without increasing the horizontal footprint or overall valve volume, maintaining a compact design.
Data Source
AI summary
A valve with a locking mechanism and an integrated valve are provided. The valve includes a handle body having a knob, the handle body being disposed rotatably on top of a valve body housing a valve shaft for opening and closing a valve piece. A cutout stepped face is formed on a part of the outer periphery of the valve body located under the handle body. A locking plate having a locking hole is placed rotatably in the cutout stepped face via a pivotally attaching portion, and when the locking plate is rotated to either a position at which the valve body is in a full-close state or a position at which the valve body is in a full-open state, the locking hole is faced the upper surface area of the valve body to allow locking.


