Valve Manifold Assembly Stem Extraction Design
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Solution Overview
Problem
Existing valve manifold combinations in the semiconductor industry create quiescent or dead spots in primary fluid flow ducts, leading to fluid stagnation and contamination, and disrupt fluid flow due to valve stem obstructions.
Innovation Solution
A valve manifold assembly with a valve stem that extends away from the main fluid flow duct, where the valve member seats on a peripheral valve seat within the duct, minimizing obstructions and dead spaces, and using a pneumatically driven valve to control secondary fluid mixing without direct stem penetration through the primary flow duct.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If the valve stem extends through the primary fluid flow duct to control secondary fluid supply, then the valve can effectively control fluid mixing, but it creates dead spots and disrupts fluid flow in the primary duct
Solution Approach 1:
The valve stem is extracted from the primary fluid flow duct and repositioned in a secondary flow passage. The valve member remains in the primary duct to control secondary fluid supply, but the stem itself is removed from the primary flow path, eliminating dead spots and flow disruption while preserving valve control capability.
2Ease of operation
If the valve stem extends directly through the middle of the primary fluid flow duct, then the valve can be actuated from a distance, but it causes excessive pressure drop and subjects large portions of the valve to primary fluid flow
Solution Approach 1:
The valve stem is extracted from the primary fluid flow duct and relocated to the secondary flow passage. This removes the stem from the high-velocity primary flow path, eliminating excessive pressure drop while maintaining remote actuation capability through the secondary passage.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design minimizes flow obstructions and dead spaces, ensuring continuous fluid flow and reducing exposure of valve components to the primary fluid, thereby preventing stagnation and contamination.
Implementation Method 1
The at least one valve has a valve stem with a valve member preferably driven pneumatically, which controls the supply of secondary fluid from a secondary duct, preferably positioned in the manifold, into a primary fluid in the main fluid flow duct.
Implementation Method 2
The valve member seats on a valve seat located at the peripheral region of the main fluid flow duct, with the valve seat facing inwardly with respect to the main fluid flow duct.
Data Source
AI summary
A valve manifold assembly including a manifold body defining a primary flow passage and a secondary flow passage fluidly coupled therewith through an aperture in the wall of the primary flow passage. A valve including a head portion and a stem extending therefrom is disposed through the aperture. The head portion has a valve sealing surface adjacent and extending around the stem, and a valve seat having a seat sealing surface facing into the primary flow passage extends around the aperture. The valve is selectively shiftable between a closed position wherein the valve sealing surface is sealingly engaged with the seat sealing surface to block fluid flow between the secondary flow passage and the primary flow passage, and an open position wherein the valve sealing surface is spaced apart from the seat sealing surface to enable fluid flow between the secondary flow passage and the primary flow passage.