Stepped Valve Orifice Insert for Low-Flow Leak Prevention

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Solution Overview

Problem

Conventional valves face issues with fluid leakage due to metal-to-metal contact misalignment and degradation of resin-based seals, which affect precision and contamination control in manufacturing processes, especially in semiconductor manufacturing.

Innovation Solution

A valve orifice insert with a plastic tubular body featuring a stepped-shaped wall and circumferential protrusions forming an interference fit within a step-shaped opening, providing a secure seal and precise control of fluid flow without metal-to-metal contact.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If metal-to-metal contact is used between diaphragm and valve orifice, then sealing is achieved, but misalignment and corrosion cause leakage and poor seal quality

Engineering Contradiction:
Improveseal qualityVSAvoidalignment precision
Core Design Contradiction:
ReliabilityVSManufacturing precision

Solution Approach 1:

The patent introduces a resin part as an intermediary component between the metal diaphragm and the metal valve orifice structure. This resin intermediary prevents direct metal-to-metal contact, eliminating corrosion issues and reducing sensitivity to alignment misalignment. The resin part maintains reliable sealing while being more tolerant of manufacturing variations in alignment precision.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Object-affected harmful factors

If resin part is sandwiched between metal parts with compressive forces, then metal-to-metal contact is avoided, but seal integrity degrades over time causing leakage

Engineering Contradiction:
Improvemetal-to-metal contactVSAvoidseal durability
Core Design Contradiction:
Object-affected harmful factorsVSDuration of action of stationary object

Solution Approach 1:

The patent incorporates a circumferential protrusion on the resin part that protrudes into the valve orifice opening before operation. This preliminary geometric feature ensures proper positioning and maintains compressive force on the resin part throughout operation, preventing degradation of seal integrity over time. The protrusion acts as a mechanical stop that maintains the necessary compression without requiring complex external mechanisms.

Inventive Principle:
Principle #10Preliminary action

3Adaptability or versatility

If resin part sealing surface becomes misaligned during manufacture or use, then control of very low flow rates becomes difficult

Engineering Contradiction:
Improveflow control rangeVSAvoidsealing surface alignment
Core Design Contradiction:
Adaptability or versatilityVSManufacturing precision

Solution Approach 1:

The circumferential protrusion on the resin part performs preliminary positioning and alignment during assembly. By establishing the correct position beforehand, the protrusion ensures that the sealing surface remains properly aligned during operation, enabling precise control of very low flow rates even when manufacturing alignment tolerances are not perfectly tight.

Inventive Principle:
Principle #10Preliminary action

4Reliability

If conventional valve design with multiple parts is used, then functionality is achieved, but design complexity and number of parts increases

Engineering Contradiction:
Improvesealing performanceVSAvoidnumber of parts
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent combines the sealing function and the positioning function into a single integrated resin part with an embedded circumferential protrusion. Instead of requiring separate sealing elements and positioning mechanisms, the protrusion is formed as part of the resin component itself, reducing the total number of parts while maintaining reliable sealing performance.

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution effectively prevents fluid leakage and entrapment, allowing for precise control of low flow rates and extending the valve's operational longevity by using a diametrical interference fit with engineered plastics like PEEK, reducing the complexity of the design and parts involved.

Implementation Method 1

at least one circumferential protrusion extending radially outward a predetermined distance from an outer surface of the first tubular section or an outer surface of the second tubular section to form an interference fit with the step-shaped opening

Methodology Applied
Scientific EffectInterference fit: Friction

Data Source

PatentUS20230323962A1Valve orifice insert
Publication Date: 2023.10.12 HORIBA STEC CO LTD
  • US20230323962A1 patent drawing
  • US20230323962A1 patent drawing
  • US20230323962A1 patent drawing

AI summary

A valve orifice insert has a stepped-shaped wall including a first tubular section and a second tubular section having a smaller outer dimension than the first tubular section, and a lip structure protruding axially and including a planar valve seat surface. The first tubular section and the second tubular section being are joined by a step structure. At least one circumferential protrusion extends radially outward a predetermined distance from an outer surface of the first tubular section or an outer surface of the second tubular section to form an interference fit with the step-shaped opening when the valve orifice insert is fitted into the step-shaped opening.