Fluid Supply Valve Pressure Control With Simplified Wiring
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Solution Overview
Problem
The complexity of electrical wiring and air tubes in semiconductor manufacturing processes leads to risks of breakage, twisting, and confusion during maintenance, while the miniaturization of these processes requires higher accuracy in material gas control, necessitating simplified wiring to ensure electromagnetic performance and noise reduction.
Innovation Solution
A valve system with a driving pressure control device that includes multiple automatic valves and flow rate control devices, which simplifies wiring by integrating driving pressure supply paths and enabling precise control of fluid flow rates through variable-type flow rate control devices, improving the accuracy of material gas control.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If the number of fluid control devices is increased to handle sophisticated semiconductor manufacturing processes, then the functionality and control capability are improved, but the wiring complexity increases leading to breakage, twisting, and maintenance confusion
Solution Approach 1:
The valve body is divided into a first valve body and a second valve body that can be coupled together. Each valve body has independent flow passages and ports, allowing the system to handle multiple fluids or processes while keeping each segment's wiring and connections simpler and more manageable
Solution Approach 2:
The coupling part design allows the first and second valve bodies to be connected in various configurations, enabling a single valve assembly to perform multiple functions and adapt to different semiconductor manufacturing processes without requiring entirely separate control devices
2Reliability
If wiring is simplified to prevent breakage and twisting, then reliability is improved, but the connection destination may become confused during maintenance
Solution Approach 1:
By dividing the valve into separate coupled valve bodies, each with its own defined flow passages and ports, the system maintains simpler, more reliable wiring within each segment while the modular structure clearly indicates connection destinations through standardized coupling interfaces
Solution Approach 2:
The coupling part acts as an intermediary element with clearly defined connection interfaces. The coupling part includes a coupling hole that aligns with ports on both valve bodies, providing a visual and physical guide for correct connection during maintenance without requiring complex wiring
3Manufacturing precision
If miniaturization is pursued to improve semiconductor manufacturing precision, then manufacturing precision is improved, but higher accuracy in material gas control is required which complicates the system
Solution Approach 1:
The valve is segmented into first and second valve bodies, each capable of precise control for miniaturized processes. The segmented design allows for optimized flow passages in each segment while maintaining overall system precision without requiring overly complex control mechanisms
Data Source
AI summary
The present invention is intended to improve the accuracy of control of a material gas by providing a valve with simplified wiring and a fluid supply line equipped with the valve.A valve V includes a valve body 3 and a driving pressure control device 4 coupled to the valve body 3. The driving pressure control device 4 includes: a driving pressure introduction path 431 connected to a driving pressure supply source G outside a line; an automatic valve 411 that opens and closes the driving pressure introduction path 431; a driving pressure introduction path 433 that couples to a driving pressure introduction port 3a of the valve body 3; an automatic valve 412 that opens and closes the driving pressure introduction path 433 in conjunction with the automatic valve 411 and opens and closes an exhaust passage 44 that discharges a driving pressure from the driving pressure introduction path 433; and a driving pressure introduction path 432 that couples the driving pressure introduction path 431 and the driving pressure introduction path 433 via the automatic valve 411 and the automatic valve 412.