Valve Response Time Compensation for Precise Gas Flow Control
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Solution Overview
Problem
The response time of valves used in film-forming processes, such as atomic layer deposition, varies due to aging deterioration, affecting the precision of gas flow rate control, necessitating a system to adjust response time accurately.
Innovation Solution
A valve control apparatus with an operating time measurement unit and command control unit that adjusts the timing of opening commands based on measured operating times and reference times to maintain a consistent flow rate.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If valve operation is controlled without response time adjustment, then the control system is simple, but the flow rate control precision deteriorates due to aging deterioration
Solution Approach 1:
The control apparatus measures the actual response time of the valve by detecting the timing difference between the opening command transmission and the pressure change in the downstream chamber, then uses this feedback to automatically adjust the response time adjustment amount, ensuring precise flow rate control despite aging deterioration
Solution Approach 2:
The control apparatus pre-adjusts the response time by adding an adjustment amount to the opening command transmission timing based on the measured response time, so that the valve opens at the correct moment to maintain precise flow rate control
2Manufacturing precision
If response time adjustment is implemented, then flow rate control precision is maintained, but the device complexity increases
Solution Approach 1:
The control apparatus automatically measures its own valve's response time and adjusts the opening command transmission timing based on the measured value, making the system self-calibrating and eliminating the need for external calibration equipment or complex manual adjustment mechanisms
3Measurement precision
If multiple sensors are used to detect valve anomalies, then detection precision is improved, but device complexity increases
Solution Approach 1:
The pressure sensor serves multiple functions: it detects valve opening/closing status, measures response time, monitors downstream pressure, and enables anomaly detection, eliminating the need for separate sensors for each function and simplifying the overall system
Data Source
AI summary
A valve control apparatus including: an operating time measurement unit that measures an operating time of a valve based on an operation pressure of the valve and whether the valve is open or closed; and a command control unit that receives an opening command directed to the valve and transmitted from a control apparatus, and transmits the opening command to the valve in a delayed manner based on the operating time and a predetermined reference time.