Valve Device Segmentation for Stable Gas Flow Control
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Solution Overview
Problem
The existing diaphragm valve devices used in semiconductor manufacturing face challenges with inconsistent sealing performance due to dimensional errors, affecting the stable control of large flow rates of process gases.
Innovation Solution
A valve device design featuring a cylindrical member supported by an annular plate, with a diaphragm that moves between open and closed positions to control communication between flow paths, and an urging mechanism to ensure reliable sealing, including an elastic annular plate that provides a restoring force to press the seal member against the bottom surface of the accommodation recess.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a flow path forming disk with multiple sealing locations is used, then the valve can control large flow rates, but sealing performance varies due to dimensional errors
Solution Approach 1:
The valve body is divided into an upper valve body and a lower valve body separated by a partition wall. This segmentation allows each sealing location (first sealing location between upper valve body and flow path forming disk, second sealing location between lower valve body and flow path forming disk) to be independently controlled and sealed, reducing the impact of dimensional errors on overall sealing performance while maintaining large flow rate capability
Solution Approach 2:
A resilient member (elastic element) is introduced as an intermediary component between the flow path forming disk and the valve bodies. This resilient member compensates for dimensional errors and ensures reliable sealing at both sealing locations, allowing the valve to maintain consistent sealing performance while controlling large flow rates of process gas
2Volume of moving object
If the valve is miniaturized, then it fits semiconductor manufacturing equipment, but stable control of large flow rates becomes difficult
Solution Approach 1:
The flow path forming disk is fitted into a recess of the valve body, with the disk nested within the valve structure. This nesting arrangement allows the valve to be miniaturized while maintaining efficient flow path design that enables stable control of large flow rates through optimized fluid dynamics within the compact structure
Solution Approach 2:
The valve utilizes a vertical arrangement with upper and lower valve bodies stacked along the flow direction, creating efficient use of space in the vertical dimension. This dimensional optimization allows miniaturization in horizontal directions while maintaining adequate flow path lengths and sealing surfaces for stable large flow rate control
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution provides improved sealing performance and stable control of large flow rates, ensuring reliable fluid control in semiconductor manufacturing processes.
Implementation Method 1
an annular plate that is flexible and has an outer peripheral edge portion air-tightly or liquid-tightly fixed to an annular support portion formed on an inner peripheral surface of the accommodation recess of the valve body, an inner peripheral edge portion air-tightly or liquid-tightly fixed to an annular support portion formed on an outer peripheral surface of the cylindrical member
Data Source
AI summary
A valve device includes a valve body; a cylindrical member provided in an accommodation recess and communicating with the first flow path; a valve seat supported by the cylindrical member; a seal member interposed between the periphery of the opening of first flow path on the bottom surface of the accommodation recess and the lower end portion of the cylindrical member; an annular plate which is flexible, air-tightly or liquid-tightly fixed to an annular support portion formed on the inner peripheral surface of the accommodation recess, air-tightly or liquid-tightly fixed to an annular support portion formed on the outer peripheral surface of the cylindrical member and has a plurality of openings communicating with the second flow path; and a diaphragm that moves between an open position at which the diaphragm does not contact the valve seat and a closed position at which the diaphragm contacts the valve seat.