Valve Device Segmented Actuation for Precise Flow Control
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Solution Overview
Problem
In semiconductor manufacturing processes using atomic layer deposition (ALD), air-operated valves struggle to precisely adjust gas flow rates due to temperature influences and high-frequency operation, leading to valve aging and increased man-hours for adjustments.
Innovation Solution
A valve device with a main actuator, an adjusting actuator, and a pressure stabilizing mechanism, including a pressure regulator, allows for precise flow rate control by moving the operating member and stabilizing drive fluid pressure, reducing the need for frequent adjustments and minimizing the impact of pressure fluctuations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Extent of automation
If pneumatic or mechanical adjustment is used for flow rate control, then the valve can be operated automatically, but the flow rate adjustment precision is insufficient
Solution Approach 1:
The actuation system is segmented into two independent parts: a main actuator for automatic open/close operation and an adjusting actuator for precise flow rate adjustment. This segmentation allows each component to specialize in its function, with the adjusting actuator providing fine control over the valve element's position to achieve precise flow rate control while maintaining automatic operation capability.
Solution Approach 2:
The adjusting actuator serves as an intermediary between the automatic control system and the valve element. It receives control signals and translates them into precise positional adjustments of the valve element, thereby mediating between automated operation commands and the actual flow rate control requirement.
2Productivity
If the valve is operated at high frequency in high temperature environment, then the process gas can be supplied continuously, but the valve aging accelerates and requires frequent adjustments
Solution Approach 1:
The patent replaces traditional mechanical adjustment mechanisms with an adjusting actuator that can precisely control the valve element's position. This substitution reduces mechanical wear and aging caused by frequent manual adjustments, thereby improving valve durability while maintaining continuous operation capability in high-temperature environments.
3Speed
If pressure fluctuation of drive fluid is not stabilized, then the valve response is fast, but the flow rate control precision deteriorates
Solution Approach 1:
The adjusting actuator acts as a mediator that compensates for pressure fluctuations in the drive fluid. By receiving control signals and making precise positional adjustments to the valve element, it counteracts the effects of pressure variations, thereby maintaining flow rate control precision while preserving the fast response capability provided by the main actuator.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enables precise and immediate flow rate adjustments, significantly reducing man-hours required for adjustments and achieving more accurate flow control, while suppressing the influence of pressure fluctuations on the actuator.
Implementation Method 1
a main actuator for moving the operating member to the open position or the closed position by receiving a pressure of a supplied drive fluid
Implementation Method 2
the pressure stabilizing mechanism includes a pressure regulator that regulates the pressure of the drive fluid to be supplied
Implementation Method 3
The adjusting actuator may have a drive source which expands and contracts in response to supply of electricity. Preferably, the adjusting actuator includes an actuator utilizing expansion and contraction of a piezoelectric element.
Data Source
AI summary
Provided is a valve device which can precisely adjust the flow rate while ensuring the flow rate of the fluid. A valve device includes a main actuator which receives a pressure of a supplied drive fluid and moves an operating member to an open position or closed position; an adjusting actuator arranged to receive at least a part of a force generated by the main actuator and for adjusting the position of the operating member positioned at the open position; and a pressure regulator provided in a feed path of the drive fluid to the main actuator and for regulating the pressure of the supplied drive fluid to suppress fluctuation of the pressure of the drive fluid supplied to the main actuator.