Valve Assembly Temperature Sensing for Heated Chemical Flow
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Solution Overview
Problem
Conventional systems for regulating temperature in semiconductor device fabrication face inefficiencies in heating and inaccurate temperature monitoring, particularly in portions of the chemical flow path that extend away from the heating source.
Innovation Solution
A valve assembly with a body comprising a bottom and top portion, a closing mechanism, an actuator, and temperature sensors configured to accurately monitor and regulate the temperature of chemicals throughout the flow path.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If conventional heating equipment and temperature monitoring equipment are used throughout the chemical flow path, then temperature regulation is achieved at monitored locations, but heating efficiency is insufficient and temperature monitoring accuracy is poor in portions extending away from the heating source
Solution Approach 1:
The patent applies local quality by positioning temperature monitoring equipment at specific strategic locations within the valve assembly rather than uniformly throughout the flow path. The temperature sensor is placed in thermal communication with the chemical flow at key points where temperature regulation is most critical, enabling accurate local measurements without requiring comprehensive heating and monitoring of the entire flow path. This localized approach improves measurement precision while reducing energy consumption.
Solution Approach 2:
The valve assembly body acts as an intermediary thermal conductor between the heating source and the chemical flow. The body is configured to conduct heat efficiently to the chemical while the temperature monitoring equipment monitors the thermal state at strategic points. This intermediary structure enables effective temperature regulation without requiring direct heating equipment at every location in the flow path.
2Measurement precision
If temperature monitoring equipment is placed throughout the entire chemical flow path, then comprehensive temperature detection is achieved, but the system complexity and cost increase
Solution Approach 1:
The patent implements local quality by strategically positioning temperature monitoring equipment at specific locations within the valve assembly where temperature regulation is most critical. Rather than distributing sensors throughout the entire flow path, the sensor is placed in thermal communication with the chemical at key points, achieving sufficient temperature detection accuracy with minimal equipment while reducing system complexity.
Solution Approach 2:
The valve assembly body serves multiple functions: it houses the closing mechanism, provides the flow path structure, conducts heat from the heating source, and positions the temperature monitoring equipment. This multi-functionality reduces the need for separate dedicated temperature monitoring structures, thereby simplifying the overall system while maintaining effective temperature detection.
3Temperature
If heating equipment is distributed throughout the chemical flow path, then uniform heating is achieved, but energy consumption and device complexity increase
Solution Approach 1:
The patent applies local quality by concentrating heating and monitoring at strategic locations rather than distributing them uniformly throughout the flow path. The temperature sensor is positioned to monitor the chemical temperature at the most critical point, and the heating equipment is positioned to efficiently heat the chemical at that location. This localized approach achieves sufficient temperature uniformity while minimizing energy consumption.
Solution Approach 2:
The valve assembly body serves as a thermal intermediary that distributes heat from a centralized heating source throughout the chemical flow path. The body's thermal conduction properties enable uniform heating of the chemical without requiring multiple distributed heating elements, thereby reducing energy consumption and system complexity while maintaining temperature uniformity.
Data Source
AI summary
A valve assembly may provide a body comprising a bottom portion and a top portion having a threaded region, a closing mechanism situated above the top portion of the body, an actuator in communication with the closing mechanism, a nut configured to attach to the threaded region, and a threaded hole extending into at least one of the bottom portion of the body or the nut.