Vanadium Glass Coating for High Vacuum in Charged Particle Beam Devices
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Solution Overview
Problem
Charged particle beam devices face challenges in maintaining a high vacuum environment due to complex internal structures, which limit the effectiveness of external vacuum pumps and existing methods for suppressing charge-up do not improve the degree of vacuum.
Innovation Solution
Incorporating vanadium-containing glass in the inner walls and components of the vacuum container, either as a material for the container itself or as a coating, to enhance vacuum conditions through its getter effect, even in areas with low evacuation conductance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If external vacuum pumps are used to create high vacuum, then vacuum degree can be improved, but device complexity increases and evacuation conductance is limited by complex internal structure
Solution Approach 1:
The vacuum container performs vacuum evacuation by its own material property (getter effect of vanadium-containing glass) rather than relying on external vacuum pumps. The inner wall material actively absorbs residual gas molecules, enabling the container to maintain high vacuum state autonomously despite complex internal structure limitations on evacuation conductance.
Solution Approach 2:
The invention changes the material parameter of the vacuum container inner wall to vanadium-containing glass, which possesses getter effect. This material parameter change enables active gas absorption capability, transforming the container from a passive structure to an active vacuum maintenance system that overcomes the limitation of low evacuation conductance caused by complex internal structure.
2Object-affected harmful factors
If insulating members are used to prevent charge-up, then charge-up can be suppressed, but vacuum degree is not improved
Solution Approach 1:
The vanadium-containing glass inner wall performs multiple functions simultaneously: it provides electrical insulation to prevent charge-up (functioning as an insulating member) and actively maintains high vacuum through getter effect (functioning as a vacuum maintenance mechanism). This multi-functionality eliminates the need for separate insulating members that would not contribute to vacuum improvement.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The use of vanadium-containing glass allows for the creation of a high vacuum environment within the charged particle beam device, reducing gas discharge and charge-up, and improving the device's performance by enabling localized evacuation without the need for large external pumps.
Implementation Method 1
at least one of an inner wall in the vacuum container and a member arranged inside the vacuum container is formed of vanadium-containing glass
Data Source
AI summary
The purpose of the present invention is to provide a charged particle beam device that exhibits high performance due to the use of vanadium glass coatings, and to provide a method of manufacturing a component for a charged particle beam device. Specifically provided is a charged particle beam device using a vacuum component characterized by comprising a metal container, the interior space of which is evacuated to form a high vacuum, and coating layers formed on the surface on the interior space-side of the metal container, wherein the coating layers are vanadium-containing glass, which is to say an amorphous substance. Coating vanadium glass onto walls of a space where it is desirable to form a high vacuum, for example walls in the vicinity of an electron source, reduces gas discharge in the vicinity of the electron source, and the getter effect of the coating layer induces localized evacuation and enables the formation of an extremely high vacuum, even in spaces having a complex structure, without providing a large high-vacuum pump.