Vapor Delivery Container Flow Distributor for Precursor Utilization
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Solution Overview
Problem
Conventional containers for delivering chemical vapor from solid precursors face challenges in achieving high precursor utilization due to inefficient carrier gas distribution, leading to lower delivery rates at low container fill levels and increased difficulty in cleaning and refilling.
Innovation Solution
A chemical precursor container design featuring a vessel with a flow distributor having concentric annular arrays of apertures, positioned to ensure uniform gas impingement on the precursor surface, enhancing precursor sublimation and vaporization efficiency while simplifying cleaning and refilling processes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If the inlet conduit is positioned above the precursor surface, then the container structure is simpler, but the precursor delivery rate is significantly lower at low container fill levels
Solution Approach 1:
The inlet conduit is repositioned from above the precursor surface to below the precursor surface, inverting the conventional configuration. This allows carrier gas to bubble upward through the precursor, ensuring consistent contact and sublimation rates regardless of fill level, thereby resolving the productivity issue while maintaining structural simplicity
Solution Approach 2:
The system uses pneumatic flow through the precursor material - carrier gas is forced through the solid precursor via the inlet conduit positioned below the surface, creating bubbles that enhance mass transfer and maintain consistent delivery rates by utilizing gas flow dynamics rather than relying on gravity or surface positioning
2Device complexity
If conventional carrier gas circulation is used, then the container design is simpler, but precursor utilization is low and the container is difficult to clean and refill
Solution Approach 1:
The container design is segmented into distinct functional zones: the inlet conduit positioned below the precursor surface for gas introduction, the precursor storage chamber, and the outlet conduit positioned above for vapor extraction. This segmentation optimizes each zone's function, improving precursor utilization by ensuring complete carrier gas saturation while maintaining ease of cleaning and refilling
Solution Approach 2:
The carrier gas acts as an intermediary medium that facilitates precursor sublimation and transport. By positioning the inlet conduit below the precursor surface, the carrier gas bubbles through the material, maximizing contact area and transfer efficiency, which improves precursor utilization without complicating the container design
3Ease of operation
If the carrier gas momentum is insufficient to perturb the precursor surface, then the container operation is gentler, but the precursor delivery rate is lower at low fill levels
Solution Approach 1:
The system employs pneumatic bubbling action where carrier gas is forced through the precursor material via the inlet conduit positioned below the surface. This creates natural convection and perturbation of the precursor surface through bubble formation and rise, maintaining high delivery rates at low fill levels without requiring high gas momentum or aggressive operational conditions
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The container design improves precursor utilization by maintaining consistent delivery rates across varying fill levels and simplifies the cleaning and refilling process, addressing the inefficiencies of prior art designs.
Implementation Method 1
a flow distributor positioned inside the vessel and in fluid flow communication with the inlet conduit, the flow distributor including at least one conduit having a plurality of apertures formed therein for expelling gas from the inlet conduit into the vessel
Implementation Method 2
a carrier gas is bubbled through and becomes saturated with the precursor via a dip pipe
Implementation Method 3
The delivery of chemical vapor from a solid precursor by sublimation, is one of the subject matters of the present invention
Data Source
AI summary
A chemical precursor container is disclosed. The container includes a vessel and a lid that define an interior volume, an inlet conduit, an outlet conduit, and a flow distributor positioned inside the vessel and in fluid flow communication with the inlet conduit. The flow distributor has an annular shape and includes a distributor floor having a plurality of apertures formed therein for expelling carrier gas therethrough. The flow distributor includes an inner annular wall that defines a porthole in the flow distributor that allows fluid to pass through the flow distributor from the interior volume of the vessel to the outlet conduit.