Vapor-Permeable Precursor Capsule for Vapor Deposition
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Solution Overview
Problem
Current precursor delivery systems for vapor deposition processes face inefficiencies in vaporization due to agglomeration of solid precursors and complexities in handling and refilling, especially for solid precursors with low vapor pressures, which can lead to reduced surface area and altered dose behavior, and require stringent handling conditions.
Innovation Solution
The use of vapor-permeable precursor capsules that increase the surface area available for vaporization, reduce agglomeration, and simplify the refilling process by allowing pre-filled capsules to be loaded into a vessel, thereby reducing particle contamination and the need for additional filters.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If solid precursor is heated above ambient temperature to achieve high vaporization, then vaporization efficiency is improved, but precursor agglomeration occurs leading to reduced surface area
Solution Approach 1:
The precursor is divided into multiple small granules instead of a single large mass. This segmentation increases the total surface area available for vaporization and prevents agglomeration by maintaining physical separation between precursor particles, allowing efficient vaporization without loss of surface area consistency.
Solution Approach 2:
The precursor particle size is changed from large to small granules. This parameter change increases the surface area to volume ratio, enabling effective vaporization at lower temperatures without causing agglomeration, thus resolving the contradiction between vaporization efficiency and surface area consistency.
2Ease of operation
If precursor vessel is refilled manually, then handling flexibility is improved, but time consumption and cost increase
Solution Approach 1:
The precursor is pre-packaged into capsules before being loaded into the vessel. This preliminary packaging action allows for rapid refilling by simply replacing capsules rather than performing complex manual filling operations, significantly reducing refilling time while maintaining handling flexibility.
Solution Approach 2:
Disposable precursor capsules are used instead of refillable vessels. These single-use capsules simplify the refilling process to a simple replacement operation, eliminating the time-consuming manual filling procedure while maintaining ease of operation through standardized capsule handling.
3Ease of operation
If precursor is handled in open environment, then ease of loading is improved, but particle contamination occurs
Solution Approach 1:
The precursor is extracted from its original packaging and placed into sealed capsules in a controlled environment. This extraction and encapsulation process prevents particle contamination by isolating the precursor from the open environment during handling, while still allowing easy loading into the vessel through standardized capsule insertion.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enhances vaporization efficiency, reduces agglomeration effects, and provides a cost-effective and efficient method for refilling precursor vessels, allowing for higher throughput and extended particle filter lifetime by maintaining a consistent vaporization rate and minimizing contamination.
Implementation Method 1
The shell is vapor permeable to allow precursor in vapor form to leave the precursor capsule under vaporization conditions
Data Source
AI summary
The current disclosure relates to a precursor capsule for holding a precursor for a vapor deposition process. The precursor capsule comprises a vapor-permeable shell configured to define a precursor space, and to allow precursor in vapor form to leave the precursor capsule under vaporization conditions. The disclosure further relates to a precursor vessel comprising capsules according to the current disclosure, to a vapor deposition apparatus and a method.