Liquid Vaporization Apparatus with Integrated Heating Flow Path

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Solution Overview

Problem

Conventional liquid material vaporization apparatuses face challenges in producing a large flow rate of material gas due to reduced flow velocity after the nozzle part, leading to liquid accumulation and difficulties in providing sufficient thermal energy for vaporization, which destabilizes liquid feeding and vaporization processes.

Innovation Solution

A liquid material vaporization apparatus design that includes a gas-liquid mixing part and a vaporization part with a gas-liquid mixture lead-out pipe, where the lead-out port of the mixture is arranged within the heating flow path, eliminating liquid accumulation and ensuring stable vaporization by direct supply of the gas-liquid mixture to the heating flow path.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Speed

If the gas-liquid mixture flows from the nozzle part to the vaporizer through a connecting part, then the liquid material can be transported to the vaporizer, but the flow velocity is reduced causing liquid accumulation in the connecting part

Engineering Contradiction:
Improveflow velocityVSAvoidliquid accumulation
Core Design Contradiction:
SpeedVSQuantity of substance

Solution Approach 1:

The patent merges the lead-out port of the gas-liquid mixture directly into the heating flow path of the vaporizer, eliminating the separate connecting part. This integration ensures that the gas-liquid mixture flows directly from the nozzle into the heating region without entering a stagnant connecting section, thereby preventing liquid accumulation while maintaining transport function.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The patent extracts the problematic connecting part from the flow path between the nozzle and vaporizer. By removing this intermediate section where flow velocity reduction occurs, the design eliminates the root cause of liquid accumulation while still achieving the necessary connection between the gas-liquid mixing part and vaporizer through direct integration of the lead-out port into the heating flow path.

Inventive Principle:
Principle #2Taking out (Extraction)

2Ease of manufacture

If the connecting part between gas-liquid mixing part and vaporizer is provided, then the two components can be connected, but it is difficult to provide sufficient thermal energy for vaporization in the connecting part

Engineering Contradiction:
Improveconnection between componentsVSAvoidthermal energy for vaporization
Core Design Contradiction:
Ease of manufactureVSTemperature

Solution Approach 1:

The patent combines the lead-out port structure with the heating flow path of the vaporizer, integrating the connection function and heating function into a single unified structure. This eliminates the need for a separate non-heating connecting part while ensuring that the gas-liquid mixture receives sufficient thermal energy directly in the vaporizer's heating region.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The patent removes the non-heating connecting part from the system and replaces it with a direct integration approach where the lead-out port becomes part of the heating flow path. This extraction eliminates the thermal energy deficiency in the connecting section while maintaining the mechanical connection between components.

Inventive Principle:
Principle #2Taking out (Extraction)

3Ease of operation

If the lead-out port is arranged outside the heating flow path, then the gas-liquid mixture can be led out from the mixing part, but liquid accumulation occurs before entering the vaporizer

Engineering Contradiction:
Improveleading out gas-liquid mixtureVSAvoidliquid accumulation
Core Design Contradiction:
Ease of operationVSQuantity of substance

Solution Approach 1:

The patent merges the lead-out port location with the heating flow path interior, so that the function of leading out the gas-liquid mixture and the function of heating/vaporizing it are combined in the same spatial region. This eliminates the intermediate zone where liquid accumulation occurs while maintaining efficient mixture transport.

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration allows for stable liquid feeding and vaporization, enabling the production of material gas with a large flow rate by preventing liquid accumulation and ensuring efficient heat transfer within the vaporization process.

Implementation Method 1

a vaporization part (3) adapted to heat the gas-liquid mixture to vaporize the liquid material

Methodology Applied
Scientific EffectVaporization: Evaporation

Implementation Method 2

the vaporization part has a heating flow path for heating the gas-liquid mixture

Methodology Applied
Scientific EffectHeat transfer: Conduction (thermal)

Data Source

PatentUS10391417B2Liquid material vaporizaton apparatus
Publication Date: 2019.08.27 HORIBA STEC CO LTD
  • US10391417B2 patent drawing
  • US10391417B2 patent drawing
  • US10391417B2 patent drawing

AI summary

In order to eliminate liquid accumulation occurring between a gas-liquid mixing part and a vaporization part to stably perform liquid feeding to the vaporization part and vaporization in the vaporization part, a liquid material vaporization apparatus includes: a gas-liquid mixing part adapted to mix a liquid material and gas to produce a gas-liquid mixture; and a vaporization part adapted to heat the gas-liquid mixture to vaporize the liquid material. In addition, the gas-liquid mixing part has a gas-liquid mixture lead-out pipe for leading out the gas-liquid mixture, the vaporization part has a heating flow path HS for heating the gas-liquid mixture, and a lead-out port of the gas-liquid mixture lead-out pipe is arranged in the heating flow path HS.