Vaporization Concentration Control Module Using Delay Filter
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
The responsiveness of concentration control in vaporization systems is poor due to delayed changes in gas concentration measurements, leading to inefficient control valve operations.
Innovation Solution
A concentration control module that calculates a pressure target value using a concentration target value and measured value, applies a time delay to generate a pressure control value, and feedback-controls the valve based on this value to improve responsiveness, reducing unnecessary pressure fluctuations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Speed
If feedback control is performed by using a deviation between the measured concentration and the set concentration, then concentration control is achieved, but responsiveness is poor because a change in the measured concentration is delayed due to gas replacement inside the tank
Solution Approach 1:
The system calculates a pressure target value in advance based on the deviation between measured concentration and set concentration, before the concentration change is fully reflected in measurements. This preliminary action allows the control system to prepare for upcoming concentration adjustments, compensating for the delay caused by gas replacement time and improving overall responsiveness.
Solution Approach 2:
The patent introduces pressure as an intermediary parameter to bridge the delay between concentration measurement and control action. By controlling pressure in advance based on concentration deviation, the system indirectly prepares for concentration changes, allowing faster response without directly measuring the delayed concentration change.
2Speed
If the valve opening degree is rapidly adjusted to change concentration, then responsiveness improves, but unnecessary pressure fluctuation such as overshoot occurs
Solution Approach 1:
The delay filter applies a time delay to the pressure target value in advance, creating a cushioning effect that prevents abrupt valve adjustments. This beforehand cushioning smooths out rapid pressure changes and prevents overshoot, allowing the system to maintain stability while still achieving fast concentration control through the advance calculation of pressure targets.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach significantly shortens response times for concentration changes, improving the overall responsiveness of the vaporization system while allowing adjustments to gas replacement times without altering control parameters.
Implementation Method 1
a concentration measuring part configured to measure a concentration of the source gas
Implementation Method 2
a pressure measuring part configured to measure a pressure inside the tank
Implementation Method 3
a heating mechanism configured to heat the liquid source
Implementation Method 4
vaporize the source, and supply a source gas generated by the vaporization
Data Source
AI summary
Provided is a concentration control module that improve responsiveness of concentration control of a vaporization system, and is used in a vaporization system. The concentration control module includes a concentration measuring part configured to measure a concentration of a source gas; a valve provided in a lead-out pipe configured to lead out the source gas from the tank; a pressure target value calculating part configured to calculate a pressure target value inside the tank by using a concentration target value of the source gas, and a concentration measured value of the concentration measuring part; a delay filter configured to generate a pressure control value by applying a predetermined time delay to the pressure target value obtained by the pressure target value calculating part; and a valve control part configured to feedback-control the valve by using a deviation between the pressure control value obtained by the delay filter, and a pressure inside the tank.