Vaporized Feed Device Vertical Stacked Structure
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Solution Overview
Problem
Conventional vaporization supply apparatuses require significant installation area due to the series arrangement of preheating, vaporization, and flow rate control sections, making it difficult to install them near process chambers with limited space.
Innovation Solution
The apparatus is redesigned with a vertical three-stage structure, where the preheating, vaporization, and flow rate control sections are stacked, with independent heaters for each section and heat insulating members to maintain optimal temperatures and reduce space requirements.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If the preheating section, vaporization section, and flow rate control device are arranged in series, then each section can be maintained at its required temperature, but the installation area expands significantly
Solution Approach 1:
The patent transitions from a horizontal series arrangement to a vertical stacked configuration, utilizing the vertical dimension to reduce the horizontal footprint. The preheating section, vaporization section, and flow rate control device are arranged in the vertical direction, allowing each section to maintain its required temperature while significantly reducing the installation area.
Solution Approach 2:
The patent implements a nested structure where the vaporization section is positioned within or adjacent to the preheating section, and the flow rate control device is integrated into the vaporization section. This nesting approach allows compact arrangement of functional components, reducing overall installation area while maintaining temperature control capabilities.
2Productivity
If the vaporization section temperature is set high to ensure efficient vaporization, then vaporization efficiency improves, but the risk of thermal decomposition increases when using materials with lower decomposition temperatures
Solution Approach 1:
The patent applies different temperature settings to different sections: the preheating section operates at a temperature sufficient to preheat the liquid raw material without causing decomposition, while the vaporization section operates at a higher temperature optimized for vaporization efficiency. This localized temperature optimization ensures that each section performs its function effectively without compromising material stability.
Solution Approach 2:
The preheating section performs preliminary heating of the liquid raw material before it enters the vaporization section. This preliminary action reduces the temperature shock and thermal stress on the material during vaporization, allowing the vaporization section to operate at higher temperatures for better efficiency without causing thermal decomposition.
3Reliability
If the flow rate control device is maintained at high temperature to prevent condensation, then flow control reliability improves, but energy consumption increases
Solution Approach 1:
The patent merges the flow rate control device with the vaporization section, allowing the flow control device to benefit from the thermal environment of the vaporization section. This integration enables the flow control device to maintain reliable operation without requiring separate high-energy heating, as it shares the thermal field with the vaporization section.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration significantly reduces the installation area, allowing the apparatus to be installed closer to process chambers with limited space while maintaining efficient vaporization and flow control.
Implementation Method 1
a preheating section for preheating a liquid raw material
Implementation Method 2
a vaporization section provided on top of the preheating section for heating and vaporizing the preheated liquid raw material sent from the preheating section
Implementation Method 3
heaters for heating the preheating section, the vaporization section, and the flow rate control device
Implementation Method 4
heat insulating members to maintain optimal temperatures and reduce space requirements
Data Source
AI summary
A vaporization supply apparatus 1 includes a preheating section 2 for preheating a liquid raw material L, a vaporization section 3 provided on top of the preheating section 2 for heating and vaporizing the preheated liquid raw material L sent from the preheating section 2, a flow rate control device 4 provided on top of the vaporization section 3 for controlling the flow rate of a gas G sent from the vaporization section 3, and heaters 5 for heating the preheating section 2, the vaporization section 3 and the flow rate control device 4.