Vaporizer Cleaning via Liquid Recirculation

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Solution Overview

Problem

Existing vaporizer systems face issues with polymer deposition due to temperature fluctuations, leading to increased pressure loss, material inefficiency, and higher running costs, as well as inefficient vaporization and increased material costs when polymers form inside the vaporizer and supply pipes.

Innovation Solution

A method involving the recirculation of the source material in a liquid state, mixed with a carrier gas, is used to clean the vaporizer and supply pipes by maintaining the source material in a liquid state and using a pump to pressure-feed it through the system, ensuring the polymer can be easily removed and preventing further deposition.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Temperature

If the path downstream of the vaporizer exit is not maintained at a predetermined temperature, then the siloxane-based material liquefies and polymerizes, but this causes polymer deposition inside the vaporizer and supply pipe, leading to increased pressure loss and higher running costs

Engineering Contradiction:
Improvetemperature of path downstream of vaporizerVSAvoidpolymer deposition
Core Design Contradiction:
TemperatureVSObject-generated harmful factors

Solution Approach 1:

The invention performs preliminary cleaning action by circulating liquid source material through the vaporizer and supply pipe before polymer deposition becomes severe. The cleaning process uses a pump to force liquid source material through the system, dissolving and removing polymer deposits before they cause significant pressure loss or operational failures.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The system uses the liquid source material itself as the cleaning agent rather than introducing a separate cleaning chemical. The source material circulates through the vaporizer and supply pipe, utilizing its own chemical properties to dissolve and remove polymer deposits, thereby serving its dual function of material supply and system cleaning.

Inventive Principle:
Principle #25Self-service

2Reliability

If a polymer is produced inside the vaporizer, then it takes time to remove the polymer, but this increases the running costs of the vaporizer and vaporization apparatus

Engineering Contradiction:
Improveservice life of vaporizerVSAvoidtime to remove polymer
Core Design Contradiction:
ReliabilityVSLoss of time

Solution Approach 1:

The invention implements continuous circulation of liquid source material through the vaporizer and supply pipe using a pump. This continuous flow action constantly removes polymer deposits as they form, preventing accumulation and eliminating the need for periodic shutdowns for polymer removal, thereby maintaining continuous productive operation.

Inventive Principle:
Principle #20Continuity of useful action

Solution Approach 2:

The system performs preliminary cleaning by circulating liquid source material through the vaporizer and supply pipe before polymer deposition becomes severe. This proactive approach removes polymer deposits at early stages, preventing the need for time-consuming removal operations later.

Inventive Principle:
Principle #10Preliminary action

3Productivity

If the vaporizer is designed for large scale vaporization, then only vaporized source material can be easily delivered with polymer excluded, but this reduces liquid source material vaporization efficiency and increases material costs

Engineering Contradiction:
Improvevaporization capacityVSAvoidmaterial efficiency
Core Design Contradiction:
ProductivityVSLoss of substance

Solution Approach 1:

The invention uses hydraulic action by circulating liquid source material through the vaporizer and supply pipe under pressure generated by a pump. This liquid flow mechanically removes polymer deposits and ensures complete vaporization of the source material, improving both productivity and material efficiency by preventing polymer-related losses.

Inventive Principle:
Principle #29Pneumatics and hydraulics

Solution Approach 2:

The system changes the physical state parameter of the source material by circulating it in liquid form through the vaporizer and supply pipe. This liquid circulation approach enables effective cleaning and complete vaporization, resolving the contradiction between large-scale vaporization capacity and material efficiency.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach effectively reduces running costs and maintains efficient vaporization by ensuring the polymer is easily removable, thereby extending the service life of the vaporizer and vaporization apparatus.

Implementation Method 1

a pump to pressure-feed it through the system

Methodology Applied
Scientific EffectPressure differential: Pressure Gradient

Implementation Method 2

vaporizes a liquid source material

Methodology Applied
Scientific EffectVaporization: Evaporation

Implementation Method 3

vaporized source material

Methodology Applied
Scientific EffectPhase change: Phase Change

Implementation Method 4

mixing the source material with a carrier gas to generate a mixed fluid

Methodology Applied
Scientific EffectMixing: Diffusion

Data Source

PatentEP3936481B1Vaporizer cleaning method and vaporizing apparatus
Publication Date: 2025.01.15 FURUKAWA ELECTRIC CO LTD
  • EP3936481B1 patent drawingFigure 1A~1B
  • EP3936481B1 patent drawingFigure 2
  • EP3936481B1 patent drawingFigure 3

AI summary

To provide a method for cleaning a vaporizer and a vaporization apparatus that are capable of, even if a polymer of a source material is produced, easily removing the polymer. A method for cleaning a vaporizer that vaporizes, at normal temperature and pressure, a source material in a liquid state, and supplies the vaporized source material to a reactor through a supply pipe, includes a cleaning step of passing the source material to the vaporizer while maintaining the source material in a liquid state to clean the vaporizer. The method may further include a mixing step of mixing the source material with a carrier gas to generate a mixed fluid, and the cleaning step may include passing the mixed fluid to the vaporizer while maintaining, in a liquid state, the source material contained in the mixed fluid to clean the vaporizer.