Vaporizer Flow Transient Analysis for Pre-Vaporization State Detection
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Solution Overview
Problem
Existing vaporization devices in semiconductor manufacturing struggle to accurately determine when a material gas has returned to a state before vaporization, leading to potential product defects and delayed detection due to involvement of other factors and the need for prolonged deviation in flow rate measurements.
Innovation Solution
A vaporization device equipped with a flow rate sensor that measures transient response data, allowing for accurate determination of material gas state through analysis of behavior in transient response data, such as waveform changes, inflection points, and differential data, without the need for additional sensors.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the measured flow rate continues to deviate from the set flow rate for a predetermined time to detect vaporization failure, then false detection due to other factors (such as control failure) is reduced, but detection of the returning to the state before vaporization is delayed
Solution Approach 1:
The patent transitions from static flow rate comparison to dynamic transient response analysis. By analyzing the temporal characteristics of flow rate changes (transient response) when the on-off valve switches, the system can detect vaporization state dynamically without requiring prolonged deviation, thus resolving the contradiction between detection reliability and detection time.
Solution Approach 2:
The patent performs preliminary analysis of transient response characteristics during normal operation. By establishing baseline transient response data when vaporization is normal, the system can compare future transient responses against this baseline to detect abnormalities immediately, rather than waiting for prolonged deviation.
2Measurement precision
If additional sensors are added to detect the returning to the state before vaporization, then detection accuracy is improved, but device complexity and size increase
Solution Approach 1:
The patent makes the flow rate sensor perform multiple functions: it not only measures flow rate for control purposes but also analyzes transient response characteristics to detect vaporization state. This multi-functionality eliminates the need for additional sensors while maintaining high detection precision.
Solution Approach 2:
The patent uses transient response data as an intermediary to bridge the gap between flow rate measurement and vaporization state detection. By analyzing the temporal characteristics of flow rate changes, the system can infer vaporization state without direct sensing, thus avoiding additional hardware.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enables precise and timely detection of material gas returning to a pre-vaporization state, reducing the risk of product defects and improving operational efficiency by eliminating the need for additional sensors and potentially downsizing the device.
Implementation Method 1
a flow rate sensor that measures a flow rate of the material gas generated by the vaporizer, wherein it is determined that the material gas has returned to a state before the vaporization on a basis of transient response data that is flow rate data at a time of a transient response measured by the flow rate sensor
Implementation Method 2
a vaporizer that vaporizes a material
Data Source
AI summary
A vaporizer that vaporizes a material, a flow rate control device including a flow rate sensor that measures a flow rate of a material gas generated by the vaporizer, and a determination unit that determines that the material gas has returned to a state before the vaporization on the basis of a transient response of the flow rate measured by the flow rate sensor are included.