Vaporizer Partition Wall Structure for Pressure Stabilization
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Solution Overview
Problem
The behavior of pressure inside vaporizers using liquid material vaporization and supply systems is unstable due to intermittent supply of metal-organic materials, leading to fluctuations in vaporized gas concentration and flow rate control issues.
Innovation Solution
A vaporizer with a partition wall structure that divides the liquid material into sections, using a grid-like, honeycomb-shaped, or mesh-like partition wall, and notched liquid distribution portions to ensure uniform heat distribution and prevent convection, stabilizing the pressure behavior.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If liquid material is intermittently supplied into the vaporizer at controlled timings, then flow rate control is achieved, but the pressure behavior inside the vaporizer becomes unstable
Solution Approach 1:
The vaporizer chamber is divided into multiple sections using partition walls, which segment the liquid material into separate regions. This segmentation ensures uniform heat distribution across different areas and prevents large convection currents, thereby stabilizing pressure behavior while maintaining controlled flow rate supply.
Solution Approach 2:
Different regions within the vaporizer chamber are created with distinct thermal characteristics through the partition wall structure. Each section has optimized heat distribution properties, preventing localized overheating or cooling that would cause pressure fluctuations, thus achieving stable pressure behavior.
2Device complexity
If liquid material is supplied without a partition wall structure, then the device complexity is low, but temperature distribution becomes uneven due to large convection
Solution Approach 1:
The chamber is divided into multiple smaller sections by partition walls, which reduces the size of each region and eliminates large convection currents. This segmentation achieves uniform temperature distribution without requiring complex external cooling or heating systems, maintaining reasonable device complexity.
Solution Approach 2:
The partition wall structure introduces a spatial dimension to heat distribution by creating multiple vertical and horizontal zones. This multi-dimensional segmentation ensures heat is distributed uniformly throughout the liquid material, preventing temperature stratification that would occur in a single-chamber design.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The partition wall structure ensures uniform heat distribution and prevents temperature imbalances, resulting in a stable pressure behavior within the vaporizer, allowing for consistent flow rate control and improved vaporization efficiency.
Implementation Method 1
a heating device that heats a liquid material contained in the chamber
Implementation Method 2
heat distribution in the liquid material is made uniform and the liquid material temperature is prevented from being made uneven by generation of a large convection
Implementation Method 3
heat distribution in the liquid material is made uniform
Data Source
AI summary
A vaporizer, capable of stabilizing the behavior of pressure inside the vaporizer, includes a chamber having an inlet and an outlet, a heating device that heats the inside of the chamber, a partition wall structure 13 that is provided inside the vaporizer and partitions the liquid material inside the chamber into a plurality of sections, and liquid distribution portions 20 that are provided at the lower portion of the partition wall structure 13 and that allow liquid distribution among the sections partitioned by the partition wall structure 13, and the partition wall structure includes a grid-like, honeycomb-shaped, mesh-like, or pipe-shaped partition wall.