Vaporizer with Primary Filter for Low-Temperature Liquid Vaporization
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing vaporizers for CVD apparatuses face challenges in efficiently vaporizing liquid materials with low vapor pressure and low thermal stability, leading to thermal decomposition and polymer accumulation, which blocks passages and reduces deposition rates.
Innovation Solution
A vaporizer design that uses a primary filter heated by heaters to vaporize and atomize liquid materials with a carrier gas, creating a larger surface area for efficient heat transfer and preventing thermal decomposition, while a secondary filter ensures complete vaporization of any remaining mist, and a heat isolation mechanism prevents excessive temperature transfer to the liquid supply portion.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the temperature of vaporization is increased to vaporize a large amount of liquid material with low vapor pressure, then the vaporization performance is improved, but the liquid material undergoes thermal decomposition and chemical modification
Solution Approach 1:
The vaporization chamber is divided into multiple temperature zones: a first region with lower temperature for initial vaporization and a second region with higher temperature for complete vaporization. This segmentation allows different stages of vaporization to occur at appropriate temperatures, preventing thermal decomposition while achieving high vaporization efficiency.
Solution Approach 2:
Different regions of the vaporization chamber are assigned different temperature characteristics. The region where liquid material first contacts the heater is maintained at a lower temperature to prevent decomposition, while downstream regions are hotter to ensure complete vaporization. This local quality differentiation resolves the contradiction between vaporization efficiency and material stability.
2Productivity
If the temperature of vaporization is excessively increased to improve vaporization performance, then more liquid material can be vaporized, but thermal decomposition products and polymers accumulate in the vaporizer and block passages
Solution Approach 1:
The vaporization process is segmented into multiple stages occurring in different spatial regions. The first stage at lower temperature prevents decomposition product formation, while the second stage at higher temperature completes vaporization. This segmentation maintains passage畅通性 by avoiding decomposition while achieving high vaporization rate.
Solution Approach 2:
The liquid material is pre-heated and partially vaporized in the first region before entering the second region. This preliminary action at controlled temperature prevents the formation of decomposition products that would block passages, while still achieving the required overall vaporization rate.
3Device complexity
If conventional heating methods are used to vaporize liquid material, then the structure is simple, but the vaporization efficiency is insufficient and high temperature is required leading to thermal decomposition
Solution Approach 1:
The heating system is segmented into multiple heater units positioned at different locations within the vaporization chamber. This allows independent temperature control in different regions, achieving high vaporization efficiency without requiring excessively high temperatures that would cause decomposition. The segmented structure remains relatively simple while dramatically improving vaporization performance.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design achieves high vaporization efficiency at lower temperatures, preventing thermal decomposition products and polymers from accumulating, allowing for increased deposition rates and stable vaporization performance, even with thermally unstable compounds.
Implementation Method 1
vaporizing the liquid material (LM) at a surface of the primary filter (80) with heat from the heaters (66), (76), and (81)
Implementation Method 2
atomized by being subjected to bubbling effect provided by the carrier gas (CG) flowing from underneath
Implementation Method 3
A mixed gas (VM+CG) including the vaporized liquid material (VM) and the carrier gas (CG) is then discharged from the top of the vaporizing chamber (60)
Data Source
AI summary
A vaporizer is provided with a vaporizing chamber heated by heaters; a primary filter positioned in a bottom end portion of the vaporizing chamber and heated by the heater; a liquid material supply portion for dropping down a flow-controlled liquid material from upper portion of the vaporizing chamber toward the primary filter; a carrier gas guiding passage for guiding a carrier gas into the underside of the primary filter; and a material delivering passage for discharging a mixed gas including the carrier gas and a vaporized liquid material from the top of the vaporizing chamber. The liquid material dropped down onto the primary filter is partially vaporized, while the rest thereof is atomized by being subjected to bubbling effect provided by the carrier gas flowing from underneath.