Vaporizer Support Structure for Compact Gas Flow Measurement
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Solution Overview
Problem
In semiconductor production, existing vaporizers face challenges in narrowing their width and efficiently managing multiple gas supply lines due to the difficulty in removing and installing flow rate measuring means and valves, especially when space is limited, leading to increased complexity and reduced operability.
Innovation Solution
The vaporizer design incorporates a detachable panel and a first support member that allows for easy removal and installation of flow rate measuring means and valves, along with heat conducting members that efficiently transmit heat to the conduit, reducing the need for internal tool operation space and enabling narrower designs or multiple gas supply lines.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Stability of the object's composition
If the flow rate measuring means and valve are fixed to the heater plate on the mounting panel side, then the structural stability is improved, but the ease of repair deteriorates because the detachable panel must be removed and tools must be inserted through the cabinet interior
Solution Approach 1:
The support structure is segmented into two independent support members: one fixed to the mounting panel and another fixed to the detachable panel. This segmentation allows the flow rate measuring means and valve to be accessed from the detachable panel side without removing the panel, while maintaining stable fixation through the distributed support structure.
Solution Approach 2:
A second support member fixed to the detachable panel acts as an intermediary element that provides access points on the detachable panel side. This intermediary structure enables tool insertion and component removal without compromising the structural stability provided by the first support member fixed to the mounting panel.
2Productivity
If the vaporizer width is reduced to save space, then the productivity is improved, but the ease of operation deteriorates due to limited space for tool insertion and component removal
Solution Approach 1:
The support structure utilizes the width dimension of the cabinet by extending support members laterally from both the mounting panel and detachable panel. This dimensional approach allows components to be positioned and accessed from the front side, eliminating the need for deep tool insertion through the cabinet interior and enabling easier operation in compact configurations.
Solution Approach 2:
The support function is divided between two separate support members positioned at different locations. This segmentation creates multiple access points on the detachable panel side, allowing tools to be inserted from the front without requiring excessive cabinet width or depth.
3Productivity
If multiple gas supply lines are installed to increase productivity, then the productivity is improved, but the device complexity increases due to more components requiring installation and maintenance
Solution Approach 1:
The dual support member structure serves as a universal platform that can accommodate multiple gas supply lines, flow rate measuring means, and valves. By providing standardized support points on both the mounting panel and detachable panel sides, the system can efficiently manage multiple gas supply lines without proportionally increasing installation and maintenance complexity.
4Ease of repair
If the flow rate measuring means is removed for inspection, then the ease of repair is improved, but the loss of time increases due to the need to remove the detachable panel and maneuver tools through the cabinet interior
Solution Approach 1:
The detachable panel is pre-configured with a support member that provides direct access to the flow rate measuring means and valve from the front side. This preliminary arrangement of the support structure eliminates the need for time-consuming panel removal and tool maneuvering through the cabinet interior during inspection and repair operations.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration simplifies the removal and installation of flow rate measuring means and valves, reduces the vaporizer's width, and allows for efficient heat transfer, preventing condensation and enhancing operational efficiency.
Implementation Method 1
the heater plate 7 heats the conduit 4
Implementation Method 2
one or more heat conducting members 9 which conduct heat to the conduit 4 from the heater plate 7
Implementation Method 3
Liquid material stored in the tank 2 is heated and evaporated by a tank heater 2a
Data Source
AI summary
A vaporizer includes a tank in which liquid material is heated to generate gas, a cabinet which houses the tank, and a conduit which supplies the gas to the outside of the cabinet. The vaporizer also includes a flow rate measuring means which measures a flow rate of the gas flowing through said conduit, and a heater plate which heats the conduit. The cabinet comprises a detachable panel that is a panel which can be removed. A first support member is fixed directly or indirectly to said cabinet at a position other than said detachable panel, the flow rate measuring means is supported by said first support member, and the heater plate is supported between said flow rate measuring means and said detachable panel by said first support member.