Semiconductor Vaporizer Level Estimation Using Sidewall Temperature Sensing
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Solution Overview
Problem
Existing semiconductor manufacturing processes face challenges in stably supplying processing gases at a predetermined flow rate, particularly when switching between containers, and accurately measuring the remaining amount of materials using liquid level sensors.
Innovation Solution
A vaporizer system equipped with temperature sensors on the side wall of a storage tank, a collector to guide liquid material to a lower end sensor, and a controller to estimate the remaining amount of liquid material based on temperature changes, ensuring precise replenishment and maintaining a stable gas supply.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If liquid level sensors are used to measure the remaining amount of material, then the remaining amount can be measured, but the measurement accuracy deteriorates when the container is switched or when material flow is unstable
Solution Approach 1:
The patent replaces the mechanical liquid level sensor with a thermal measurement system using temperature sensors and heat conduction principles. The remaining amount of liquid material is determined by measuring temperature distribution and heat conduction characteristics, which are less affected by container switching and material flow instability compared to mechanical level sensors.
Solution Approach 2:
The patent changes the measurement parameter from liquid level position to temperature distribution. By measuring temperature at multiple points and analyzing heat conduction patterns, the system determines remaining material amount through thermal parameters rather than mechanical level detection, improving reliability during container transitions.
2Duration of action of moving object
If processing gas supply is switched between containers, then continuous supply can be maintained, but the stability of flow rate deteriorates during switching
Solution Approach 1:
The patent implements a feedback control system where temperature sensors continuously monitor the liquid material state, and the controller adjusts the gas supply accordingly. This feedback mechanism maintains stable flow rates during container switching by detecting changes in liquid temperature and remaining amount, allowing seamless transitions without compromising flow stability.
Solution Approach 2:
The system performs preliminary measurements of temperature distribution before container switching occurs. By anticipating the need for switching and preparing in advance based on temperature-based remaining amount detection, the system ensures continuous stable gas supply without interruptions or flow rate fluctuations during the actual switching operation.
3Measurement precision
If temperature sensors are placed on the side wall of the storage tank, then the remaining amount can be estimated, but the sensor may be affected by external temperature variations
Solution Approach 1:
The patent divides the temperature measurement into multiple discrete sensor positions on the side wall of the storage tank. By segmenting the measurement into several points rather than relying on a single sensor, the system can analyze temperature distribution patterns and distinguish between internal liquid temperature effects and external environmental variations, improving measurement accuracy despite external interference.
Solution Approach 2:
The patent uses the storage tank wall itself as an intermediary medium between the liquid material and the temperature sensors. The sensors mounted on the external side wall measure temperature through the wall material, which acts as a thermal buffer that filters out high-frequency external temperature variations while still transmitting the thermal state information from the liquid material.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables accurate estimation and management of the remaining liquid material, enhancing the stability and efficiency of processing gas supply, preventing reliquefaction, and improving vaporization efficiency.
Implementation Method 1
a plurality of temperature sensors provided on a side wall of the main body; a controller configured to be able to estimate a remaining amount of the liquid material based on a temperature detected by the plurality of temperature sensors
Implementation Method 2
a vaporizer, processing apparatus, processing method and method of manufacturing semiconductor device... a liquid material unit that supplies liquid material... a storage unit that stores the liquid material... a heater configured to be able to heat the liquid material
Implementation Method 3
a heater configured to be able to heat the liquid material
Implementation Method 4
a collector formed to collect the material on a side wall side on which a temperature sensor disposed at a lower end among the plurality of temperature sensors is provided
Data Source
AI summary
A vaporizer includes a main body that stores a liquid material at room temperature, a plurality of temperature sensors provided on a side wall of the main body, and a collector formed to collect the material on a side wall side on which a temperature sensor disposed at a lower end among the plurality of temperature sensors is provided.