Variable Alignment Device for Semiconductor Buffer Storage
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Solution Overview
Problem
Conventional article transfer systems in semiconductor manufacturing require separate buffers for different types of containers, leading to increased installation volume, reduced space utilization, and inconvenient equipment operation due to complex transfer paths.
Innovation Solution
An apparatus with a variable alignment device on the article storage rack, featuring adjustable protrusions and elastic springs, allows for the storage of multiple article types by aligning and accommodating protrusions to prevent interference, enabling a single buffer to handle both reticle pods and FOUPs, thereby reducing installation volume and simplifying transfer paths.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If separate buffers are configured for each container type, then each buffer can be optimized for its specific container, but the installation volume increases and space utilization decreases
Solution Approach 1:
The buffer is designed with a universal structure that can accommodate multiple container types (reticle pods and FOUPs) through a variable alignment device. The alignment device can be adjusted to match different container geometries, allowing a single buffer to perform the functions previously requiring separate dedicated buffers, thereby reducing total installation volume while maintaining optimization for each container type
2Manufacturing precision
If separate buffers are configured for each container type, then container-specific alignment is achieved, but the number of installations increases and space utilization is reduced
Solution Approach 1:
The buffer employs a variable alignment device with movable components that can be dynamically adjusted to accommodate different container types. The alignment protrusions can be positioned at different locations on the buffer base plate, allowing the same physical buffer structure to provide precise alignment for both reticle pods and FOUPs without requiring multiple separate buffer installations
3Reliability
If separate buffers are used for different container types, then specific storage requirements are met, but the transfer path becomes long and complicated
Solution Approach 1:
By merging the storage capabilities for different container types into a single buffer unit with variable alignment, the system eliminates the need for separate buffer locations. This consolidation shortens transfer paths by reducing the number of stops and routing complexity, while the variable alignment device ensures that each container type can still be stored with appropriate precision at the same location
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution allows for efficient storage and transfer of multiple article types, maximizing space utilization and simplifying equipment operation by reducing the number of installations and streamlining transfer paths, facilitating the handling of both reticle pods and FOUPs within a semiconductor distribution line.
Implementation Method 1
at least one elastic spring having a restoring force acting in a direction in which the movable plate is lifted
Data Source
AI summary
The present invention relates to an apparatus and a method for storing an article, capable of storing at least two types of articles transferred in a semiconductor distribution line, in which the apparatus includes: an article storage rack including a space for storing a first article or a second article; and a variable alignment device installed on the article storage rack, in which at least one first alignment protrusion protrudes outward to align the first article when the first article is seated, and the first alignment protrusion is accommodated inward so that the first alignment protrusion does not interfere with the second article when the second article is seated.