Variable Capacitor Laser Micromachining Tuning

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Solution Overview

Problem

Existing variable capacitors face issues such as drift due to temperature changes, limited tuning range, high manufacturing and tuning costs, large size, and limited performance in high-frequency applications, with silicon-based MEMS devices being costly and inefficient.

Innovation Solution

The development of a microfabricated discrete variable capacitor using low-temperature co-fired ceramics and other low-cost substrates with laser micromachining for precise tuning, enabling high-frequency performance, low cost, and compact size, along with active tuning capabilities through open- or closed-loop control.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If manual tuning of variable capacitors is performed on the factory floor, then the desired capacitance value can be achieved, but the process is time-intensive and costly

Engineering Contradiction:
Improvecapacitance value accuracyVSAvoidtuning process speed
Core Design Contradiction:
Manufacturing precisionVSProductivity

Solution Approach 1:

The patent replaces the manual mechanical tuning process with automated laser micromachining. The laser system precisely removes material from the capacitor electrodes to achieve the desired capacitance value, eliminating the need for manual screw adjustment and significantly increasing production speed while maintaining or improving tuning accuracy.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent implements self-tuning capabilities through feedback control systems that automatically adjust the capacitor's capacitance value. The system monitors the actual capacitance and uses feedback signals to control the laser micromachining process, enabling the capacitor to tune itself without human intervention and improving both productivity and consistency.

Inventive Principle:
Principle #25Self-service

2Adaptability or versatility

If mechanical adjustment mechanisms are used in variable capacitors, then capacitance can be tuned, but the device is prone to drifting from the desired capacitance value over time due to temperature effects

Engineering Contradiction:
Improvecapacitance tuning capabilityVSAvoidcapacitance stability
Core Design Contradiction:
Adaptability or versatilityVSReliability

Solution Approach 1:

The patent eliminates mechanical adjustment mechanisms entirely, replacing them with laser-micromachined fixed electrode structures. Since there are no moving parts or mechanical connections, the capacitor cannot drift from its intended value due to thermal expansion, wear, or mechanical loosening, thereby significantly improving reliability while maintaining tuning capability through the manufacturing process.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent performs the capacitance tuning action during the manufacturing process itself using laser micromachining, rather than relying on mechanical adjustment during operation. The desired capacitance value is established once during fabrication and remains stable throughout the device's operational life, preventing drift before it can occur.

Inventive Principle:
Principle #10Preliminary action

3Ease of operation

If linear mechanical motion is used for tuning, then the capacitor can be adjusted, but the tuning range is limited to 10 to 1 or less

Engineering Contradiction:
Improvetuning adjustabilityVSAvoidtuning range
Core Design Contradiction:
Ease of operationVSAdaptability or versatility

Solution Approach 1:

The patent transitions from one-dimensional linear mechanical motion to multi-dimensional laser beam control. The laser can remove material from multiple locations and at varying depths, creating a two or three-dimensional tuning space that enables much broader capacitance adjustment ranges while maintaining ease of operation through automated control systems.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The patent changes the fundamental tuning parameter from mechanical displacement distance to laser energy deposition volume. By controlling the amount, location, and depth of material removal through laser parameters (power, duration, focus), the system achieves a much wider tuning range while keeping the operation simple and automated.

Inventive Principle:
Principle #35Parameter changes

4Ease of manufacture

If traditional variable capacitor designs are used, then the device can be manufactured, but it is large in size and consumes more space on mounting substrates

Engineering Contradiction:
ImprovemanufacturabilityVSAvoidcapacitor footprint
Core Design Contradiction:
Ease of manufactureVSVolume of moving object

Solution Approach 1:

The patent uses thin-film deposition techniques to create the capacitor electrodes and dielectric layers, reducing the overall thickness and footprint of the device. The laser micromachining process works effectively with these thin-film structures, enabling precise tuning while maintaining a compact form factor that consumes minimal space on mounting substrates.

Inventive Principle:
Principle #30Flexible shells and thin films

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution provides a variable capacitor with a high tuning ratio, stable performance, reduced manufacturing and tuning costs, and improved frequency performance, addressing the limitations of existing technologies by enabling precise and cost-effective production of capacitors with enhanced stability and efficiency.

Implementation Method 1

a laser micromachining means for tuning the capacitor

Methodology Applied
Scientific EffectLaser ablation: Laser Ablation

Data Source

PatentUS9099248B2Variable capacitor tuned using laser micromachining
Publication Date: 2015.08.04 CORP FOR NATIONAL RESEARCH INITIATIVES
  • US9099248B2 patent drawing
  • US9099248B2 patent drawing
  • US9099248B2 patent drawing

AI summary

A variable capacitor device is disclosed in which the capacitive tuning ratio and quality factor are increased to very high levels, and in which the capacitance value of the device is tuned and held to a desired value with a high level of accuracy and precision using a laser micromachining tuning process on suitably designed and fabricated capacitor devices. The tuning of the variable capacitor devices can be performed open-loop or closed-loop, depending on the precision of the eventual capacitor value needed or desired. Furthermore, the tuning to a pre-determined value can be performed before the variable capacitor device is connected to a circuit, or alternatively, the tuning to a desired value can be performed after the variable capacitor device has been connected into a circuit.