Variable-Class RF Power Amplifier With CLC Output Tuning

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Solution Overview

Problem

Conventional RF power amplifiers are not interchangeable and require specific designs for different plasma manufacturing processes, limiting flexibility and increasing costs, as they need to operate in either Class AB or Class E modes depending on the application, with existing solutions failing to achieve efficient and stable operation across both modes.

Innovation Solution

A variable class characteristic power amplifier that includes a switch module and an output module with a CLC network, allowing the amplifier to operate in multiple modes by varying the configuration and capacitance values, enabling seamless transition between Class AB and Class E characteristics based on input signals.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Power

If a power amplifier is designed for Class AB operation to provide linearity and power output, then linearity and power output are improved, but efficiency deteriorates (limited to about 70%)

Engineering Contradiction:
Improvepower outputVSAvoidefficiency
Core Design Contradiction:
PowerVSLoss of energy

Solution Approach 1:

The amplifier dynamically switches between Class AB and Class E operating modes based on the load condition. The control circuit monitors the load impedance and automatically adjusts the operating mode, allowing the amplifier to achieve high efficiency (Class E) when possible while maintaining the ability to deliver high power (Class AB) when required.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The amplifier changes its operating parameters (mode of operation) based on the load condition. By detecting the load impedance and switching between Class AB and Class E modes, the amplifier adapts its efficiency and power output characteristics to match the requirements of the plasma processing equipment.

Inventive Principle:
Principle #35Parameter changes

2Loss of energy

If a power amplifier is designed for Class E operation to achieve high efficiency, then efficiency is improved (at least 85%), but power output deteriorates and stability under high VSWR loads worsens

Engineering Contradiction:
ImproveefficiencyVSAvoidpower output
Core Design Contradiction:
Loss of energyVSPower

Solution Approach 1:

The amplifier dynamically selects between Class E and Class AB modes based on real-time load conditions. When the load impedance is favorable, the amplifier operates in Class E mode to maximize efficiency. When high power output is required or load conditions demand it, the amplifier switches to Class AB mode, ensuring both high efficiency and adequate power delivery.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The amplifier is designed to perform multiple functions by supporting both Class E and Class AB operating modes within a single device. This multi-functionality allows the amplifier to achieve high efficiency like Class E amplifiers while also maintaining the high power output capability and stability of Class AB amplifiers when needed.

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Reliability

If manufacturers use separate amplifiers for different plasma processes, then each process receives optimized performance, but device complexity and costs increase

Engineering Contradiction:
Improveprocess-specific performanceVSAvoidnumber of amplifiers
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The amplifier is designed as a universal device that can operate in both Class AB and Class E modes, allowing a single amplifier to replace multiple specialized amplifiers. The control circuit detects the required operating mode based on the plasma process requirements and automatically configures the amplifier accordingly, reducing the total number of devices needed while maintaining process-specific optimization.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The amplifier dynamically adapts its operating characteristics to match different plasma process requirements. By switching between Class AB and Class E modes based on the specific process needs, the amplifier provides optimized performance for each process type without requiring separate dedicated amplifiers, thereby reducing system complexity and cost.

Inventive Principle:
Principle #15Dynamics

4Adaptability or versatility

If a single amplifier is designed to operate in both Class AB and Class E modes, then adaptability is improved, but device complexity increases

Engineering Contradiction:
Improvemode flexibilityVSAvoidamplifier configuration
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The amplifier incorporates a control circuit that monitors load conditions and automatically selects the appropriate operating mode (Class AB or Class E). This feedback mechanism eliminates the need for manual configuration or complex switching mechanisms, as the amplifier self-adjusts based on real-time measurements of load impedance and process requirements.

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The amplifier is designed to automatically determine and switch between Class AB and Class E operating modes without external intervention. The control circuit continuously monitors the operating conditions and autonomously configures the amplifier for optimal performance, reducing the complexity associated with manual mode selection and configuration.

Inventive Principle:
Principle #25Self-service

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The amplifier achieves efficient and stable operation across a range of modes, improving flexibility, reducing costs, and enhancing reliability by tuning between Class AB and Class E characteristics, with increased efficiency and reduced spurious outputs, while maintaining stability under high VSWR loads.

Implementation Method 1

Conventional power amplifiers include a network including a capacitor and an inductor at an output prior to connection to a load. Such networks may also include an additional capacitor and may be referred to as a CLC network.

Methodology Applied
Scientific EffectCapacitance: Capacitance

Implementation Method 2

Conventional power amplifiers include a network including a capacitor and an inductor at an output prior to connection to a load. Such networks may also include an additional capacitor and may be referred to as a CLC network.

Methodology Applied
Scientific EffectInductance: Inductor

Data Source

PatentEP2553808B1Variable class characteristic amplifier
Publication Date: 2019.05.01 MKS INSTR INC
  • EP2553808B1 patent drawingFigure 1
  • EP2553808B1 patent drawingFigure 2
  • EP2553808B1 patent drawingFigure 3A~3C

AI summary

A power amplifier (PA) adjustably operable between two classes of operation. The range of operation lies in a range of operation between a conventional, linear, conjugately matched Class AB characteristic amplifier and a higher efficiency switching Class E characteristic amplifier. A circuit topology having a push-pull configuration (Ql, Q2 ) that allows a Class E characteristic of operation.