Variable Control Zone Thermal Processing Apparatus

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Solution Overview

Problem

Conventional vertical-type thermal processing apparatuses face challenges in quickly controlling temperature uniformity and stability, requiring extensive time to tune control parameters due to the division of the furnace body into multiple control zones.

Innovation Solution

The apparatus employs a control unit that switches between a large-number control zone mode for temperature stabilization and a small-number control zone mode for temperature adjustments, using in-furnace and in-processing-vessel temperature sensors to manage heating units and a blower, allowing for efficient temperature control by adjusting the number of control zones based on pre-incorporated numerical models.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If the furnace body is divided into multiple control zones for fine temperature control, then temperature uniformity is improved, but the time required to tune control parameters increases

Engineering Contradiction:
Improvetemperature uniformityVSAvoidtime to tune control parameters
Core Design Contradiction:
Manufacturing precisionVSLoss of time

Solution Approach 1:

The patent applies dynamics by making the number of control zones variable rather than fixed. The control unit dynamically adjusts between a first number of control zones (larger zones) and a second number of control zones (smaller zones) based on the thermal processing stage. During heating/cooling phases, fewer zones are used for faster response, while during stabilization phases, more zones are activated for finer temperature uniformity control.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The patent changes the parameter of control zone数量 (number of control zones) based on the thermal processing stage. The control unit switches between different numbers of control zones to optimize both response speed and temperature uniformity. This parameter change allows the system to adapt to different operational requirements without manual retuning.

Inventive Principle:
Principle #35Parameter changes

2Stability of the object's composition

If the number of control zones is increased for better temperature stability, then temperature uniformity during stabilization is improved, but the speed of temperature adjustment decreases

Engineering Contradiction:
Improvetemperature stabilityVSAvoidtemperature adjustment speed
Core Design Contradiction:
Stability of the object's compositionVSSpeed

Solution Approach 1:

The system dynamically adjusts the number of control zones based on whether the furnace is in a heating/cooling phase or a stabilization phase. During heating/cooling, fewer control zones are used to enable faster temperature changes. During stabilization, more control zones are activated to maintain precise temperature uniformity. This dynamic adaptation resolves the contradiction between speed and stability.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The control unit periodically switches between different control zone configurations based on the thermal processing stage. It alternates between using fewer zones for rapid temperature changes and more zones for fine-tuned stability maintenance. This periodic adjustment of control granularity optimizes both speed and stability at appropriate times.

Inventive Principle:
Principle #19Periodic action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach facilitates faster temperature control during changes and enhances uniformity during stabilization, reducing the time required for temperature convergence and maintaining precise control within a ±1°C range.

Implementation Method 1

a heating unit disposed on an inner surface of the furnace body, correspondingly to each of the unit areas of the space

Methodology Applied
Scientific EffectJoule heating: Joule Heating

Implementation Method 2

an in-furnace temperature sensor disposed correspondingly to each of the unit areas of the space

Methodology Applied
Scientific EffectThermal radiation detection: Thermal Radiation

Data Source

PatentUS9748122B2Thermal processing apparatus and method of controlling the same
Publication Date: 2017.08.29 TOKYO ELECTRON LTD
  • US9748122B2 patent drawing
  • US9748122B2 patent drawing
  • US9748122B2 patent drawing

AI summary

A control unit can select a large-number control zone model in which the number of control zones, which are independently controlled, is large, and a small-number control zone model in which the number of control zones, which are independently controlled, is small. When a temperature is increased or decreased, the control unit can select the small-number control zone model so as to control, based on signals from temperature sensors of the respective control zones C1 . . . C5 whose number is small, heaters located on the respective control zones C1 . . . C5. When a temperature is stabilized, the control unit can select the large-number control zone model so as to control, based on signals signals from the temperature sensors of the respective control zones C1 . . . C10 whose number is large, the heaters located on the respective control zones C1 . . . C10.