Variable Data Digital Lithography for Roll-to-Roll Metal Patterning

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Solution Overview

Problem

Current digital vapor phase patterning techniques face limitations in achieving high precision alignment of multiple layers and resolution, particularly in roll-to-roll printed electronics, where static patterning methods are inflexible and prone to alignment errors, and inkjet processes struggle with accurately depositing metals.

Innovation Solution

A variable data digital lithographic image forming system that uses laser patterning to dynamically modify a release oil layer on a reimageable surface or substrate, allowing for on-the-fly alignment and high-resolution metal deposition by selectively evaporating the oil to prevent metal nucleation, thereby eliminating the need for resist removal and post-process cleaning.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If static patterning methods are used in roll-to-roll printed electronics, then the manufacturing process is simpler, but alignment precision between multiple layers deteriorates and becomes prone to alignment errors

Engineering Contradiction:
Improvemanufacturing process simplicityVSAvoidalignment precision
Core Design Contradiction:
Ease of manufactureVSManufacturing precision

Solution Approach 1:

The patent implements dynamic patterning where the release oil layer is selectively evaporated using laser or electron beam scanning during the manufacturing process. This allows real-time pattern formation and adjustment, enabling precise alignment between multiple layers in roll-to-roll printed electronics while maintaining manufacturing simplicity through a single integrated process step.

Inventive Principle:
Principle #15Dynamics

2Ease of manufacture

If inkjet processes are used to deposit metals, then the deposition process is simplified, but deposition accuracy and resolution deteriorate

Engineering Contradiction:
Improvedeposition process simplicityVSAvoiddeposition accuracy
Core Design Contradiction:
Ease of manufactureVSManufacturing precision

Solution Approach 1:

The patent replaces the mechanical inkjet deposition system with a vapor phase deposition process where metal is deposited from vapor phase onto a substrate with a patterned release oil layer. This substitution enables higher deposition accuracy and resolution while maintaining process simplicity, as the vapor phase deposition naturally conforms to the underlying substrate topography and achieves precise metal placement without the clogging and accuracy issues of inkjet metal deposition.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

3Reliability

If conventional photolithography processes are used, then the patterning process is well-established, but the number of processing steps increases and complexity increases

Engineering Contradiction:
Improveprocess reliabilityVSAvoidnumber of processing steps
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent merges multiple conventional photolithography steps into a single integrated process. The release oil layer is applied and then selectively evaporated using laser or electron beam scanning to directly form the final pattern without requiring separate resist coating, exposure, development, and etching steps. This consolidation maintains process reliability while dramatically reducing the number of processing steps and overall process complexity.

Inventive Principle:
Principle #5Merging (Combining)

4Manufacturing precision

If resist layers are used for patterning, then the patterning process is well-established, but post-process cleaning and resist removal steps are required

Engineering Contradiction:
Improvepatterning precisionVSAvoidnumber of post-processing steps
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent extracts and eliminates the resist layer from the patterning process by using a release oil layer that serves the same patterning function but can be easily removed through selective evaporation. The release oil is applied as a uniform layer, selectively evaporated to form the pattern, and any remaining oil is removed through simple heating or solvent treatment, eliminating the need for complex resist removal and post-process cleaning steps while maintaining patterning precision.

Inventive Principle:
Principle #2Taking out (Extraction)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enhances alignment fidelity to 10μ or less, enables flexible circuit geometries, and increases the efficiency of metal patterning by allowing dynamic pattern adjustments during processing, reducing alignment errors and simplifying the manufacturing process.

Implementation Method 1

uses laser patterning to dynamically modify a release oil layer on a reimageable surface or substrate, allowing for on-the-fly alignment and high-resolution metal deposition by selectively evaporating the oil

Methodology Applied
Scientific EffectLaser ablation: Laser Ablation

Implementation Method 2

The substrate is then subjected to heated to evaporate the release oil from the substrate

Methodology Applied
Scientific EffectEvaporation: Evaporation

Data Source

PatentUS11479850B2Systems and methods for implementing digital vapor phase patterning using variable data digital lithographic printing techniques
Publication Date: 2022.10.25 XEROX CORP
  • US11479850B2 patent drawing
  • US11479850B2 patent drawing
  • US11479850B2 patent drawing

AI summary

A system and method are provided for implementing a unique scheme by which to execute digital vapor phase patterning on metals, semiconductor substrates and other surfaces using a proposed variable data digital lithographic image forming architecture or technique. For certain substrate printing and manufacturing applications, including some printed electronics applications, the disclosed schemes implement techniques to digitally pattern metal layers with bulk material properties in a manner that is aligned with underlying layers on the fly. The disclosed digital printing process may pattern a release oil on a substrate in support of a metal deposition process. Changeable patterning is implemented with an ability to modify the alignment of the patterns on-the-fly. The release layer on a drum is laser patterned in order that the patterned release layer is transferred to the substrate, or the patterning of the release layer is accomplished directly on the substrate.