Variable Elasticity Material Structure for MEMS Gyroscope Error Compensation
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Solution Overview
Problem
MEMS gyroscopes face errors and reduced sensitivity due to quadrature-phase signals, which are not effectively mitigated by existing methods such as heating or material removal, leading to temporary improvements only.
Innovation Solution
An error-compensated gyroscope is designed with a variable elasticity material structure (VEMS) and an error correction system. The VEMS includes phase change or ferroelectric materials with conductive electrodes, and the error correction system uses a current sensor and controller to extract the quadrature-phase signal, determine a compensation signal voltage, and apply it to the VEMS electrodes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If heating or material removal is applied to the spring-mass system, then the quadrature-phase signal is diminished temporarily, but the effect only lasts for a limited time period
Solution Approach 1:
The patent applies parameter changes by utilizing phase change materials that can reversibly transition between different elastic modulus states in response to temperature changes. By controlling the phase state of the material (e.g., crystalline vs. amorphous), the system dynamically adjusts the spring-mass system parameters to suppress quadrature-phase signals over extended periods, rather than providing only temporary suppression through heating or material removal.
Solution Approach 2:
The patent employs composite materials by integrating phase change materials into the spring-mass system structure. These composite structures combine materials with different thermal and mechanical properties to achieve both temporary and long-term quadrature-phase signal suppression, extending the duration of effectiveness beyond what single-material approaches can provide.
2Measurement precision
If heating is applied to diminish the quadrature-phase signal, then the signal amplitude is reduced, but the improvement is only temporary
Solution Approach 1:
The patent directly applies phase transitions by utilizing materials that undergo reversible phase changes (e.g., from crystalline to amorphous state) in response to thermal energy. This phase transition mechanism allows the system to maintain suppressed quadrature-phase signal amplitudes for extended durations by controlling the material's phase state, rather than relying on temporary thermal effects alone.
Solution Approach 2:
The patent changes physical parameters of the spring-mass system by exploiting phase change material properties. The elastic modulus and other mechanical parameters are dynamically adjusted through phase transitions, enabling sustained reduction of quadrature-phase signal amplitude over longer time periods compared to conventional heating methods.
3Measurement precision
If material is removed from the spring-mass system, then the quadrature-phase signal is reduced, but the effect diminishes after a limited time
Solution Approach 1:
Instead of permanently removing material, the patent changes the physical and mechanical parameters of the spring-mass system by introducing phase change materials. These materials allow dynamic adjustment of system properties (such as elastic modulus) to suppress quadrature-phase signals, providing extended duration of error suppression without the need for material removal.
Solution Approach 2:
The patent uses composite material structures that combine phase change materials with the existing spring-mass system components. This composite approach maintains the structural integrity of the system while extending the duration of quadrature-phase signal suppression, avoiding the limitations of material removal techniques.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution effectively diminishes the amplitude of the quadrature-phase signal, thereby enhancing the signal-to-noise ratio of the desired in-phase signal for longer durations, improving the accuracy and sensitivity of the MEMS gyroscope.
Implementation Method 1
a variable elasticity material structure (VEMS) on or over at least one of a surface of the spring and a surface of the movable mass; wherein the variable elasticity material structure includes variable elasticity material, and first and second VEMS electrically conductive electrodes
Implementation Method 2
The VEMS includes phase change or ferroelectric materials with conductive electrodes
Implementation Method 3
the first electrically conductive surface is adjacent and opposite the second electrically conductive surface and is separated from the second electrically conductive surface by a variable distance, wherein the first and the second electrically conductive surfaces form a capacitor
Implementation Method 4
A microelectromechanical system (MEMS) gyroscope can measure rate of rotation around an axis (of the MEMS gyroscope) using Coriolis acceleration
Data Source
AI summary
Apparatuses and methods are provided for compensating for an error in an inertial sensor such as a gyroscope. An error signal can be extracted and used to generate a compensation signal including a voltage applied to variable elasticity material on or over a spring-mass system or components thereof.