Variable Electrode Electrostatic Chuck for Precise OLED Lift-Off
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Solution Overview
Problem
Existing laser lift off (LLO) technology for manufacturing OLED displays faces challenges such as damage to the organic layer and difficulty in precise separation due to fine alignment errors or substrate movement, requiring high precision and efficiency.
Innovation Solution
An electrostatic chuck with a transformable electrode structure, featuring a frame with variable electrodes and a dechuck pin mechanism, allows for precise separation of the OLED layer from the substrate by using a laser lift off apparatus.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If existing LLO technology is used, then the organic layer can be separated from the substrate, but alignment errors or substrate movement cause damage to the organic layer and reduce separation precision
Solution Approach 1:
The patent applies the Dynamics principle by making the electrode structure transformable and adjustable. The electrostatic chuck includes variable electrodes that can be dynamically reconfigured to match different substrate patterns and positions. This dynamic adaptability allows the system to maintain precise alignment and separation even when substrate positions vary, preventing organic layer damage while ensuring reliable separation.
Solution Approach 2:
The patent implements Parameter changes by allowing the electrode configuration to be modified based on different substrate designs. The voltage applied to the electrostatic chuck and the arrangement of variable electrodes can be adjusted to optimize the separation process for specific substrate patterns, thereby improving manufacturing precision and preventing damage to the organic layer.
2Adaptability or versatility
If multiple electrostatic chucks are used for different panel designs, then various display panel designs can be accommodated, but production costs and storage loads increase
Solution Approach 1:
The patent applies the Universality principle by designing an electrostatic chuck that can perform multiple functions for different display panel designs. The variable electrode structure allows a single electrostatic chuck to adapt to various substrate patterns and sizes, eliminating the need for multiple specialized chucks. This multi-functionality reduces device complexity while maintaining high adaptability to different panel designs.
Solution Approach 2:
The dynamic reconfigurability of the electrode structure enables a single electrostatic chuck to serve multiple design purposes. By dynamically adjusting the electrode arrangement and voltage distribution, the system can accommodate different panel designs without requiring physical replacement of the electrostatic chuck, thereby reducing both device complexity and storage requirements.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables precise and efficient separation of the OLED layer from the substrate without damage, enhancing the effectiveness of the electrostatic chuck with a transformable electrode structure, allowing for precise separation and reducing the need for multiple electrostatic chucks for different panel designs, thereby reducing production costs and storage loads.
Implementation Method 1
an electrostatic chuck, configured to attach a substrate
Implementation Method 2
separate the organic layer from the substrate using a laser beam
Data Source
AI summary
An electrostatic chuck includes a frame including a pair of supports facing each other and spaced apart from each other; and a variable electrode disposed between the pair of supports and configured to move. A laser lift off apparatus includes a chamber; the electrostatic chuck disposed in the chamber; and a laser source disposed above/below the electrostatic chuck and for irradiating laser beam.