Variable Focus Mirror Optical Scanner with Insulated Driving Wire
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Solution Overview
Problem
Existing 3D optical scanners with variable focus mirrors face challenges in reducing product volume/size while preventing resonance frequency changes due to voltage application from mirror driving wires, which cause deformation and alter resonance frequencies.
Innovation Solution
The optical scanner design incorporates a substrate with a rigid body and a layered body featuring a lower conductive layer, interlayer insulation film, and upper conductive layer, where the mirror driving wire is insulated with a non-piezoelectric film, preventing voltage-induced deformation and allowing the wire to pass through the resonance scanner portion without affecting resonance frequency, thus reducing the scanner's volume by eliminating the need for extra space.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If the mirror driving wire passes through the resonance scanning section to apply voltage to the variable focus mirror, then the voltage application is simplified and the structure is compact, but the piezoelectric film deforms due to voltage and the resonance frequency changes
Solution Approach 1:
The patent divides the resonance scanning section into two distinct regions: a first region containing the piezoelectric film for resonance actuation, and a second region containing the mirror driving wire for focus control. This spatial segmentation allows both functions to coexist without interference, preventing the mirror driving wire from causing unwanted deformation in the piezoelectric film while maintaining a compact structure.
Solution Approach 2:
The patent applies different functional properties to different locations within the resonance scanning section. The first region is designed with piezoelectric material for resonance actuation, while the second region is designed to accommodate the mirror driving wire for focus control. This local differentiation allows each region to perform its specific function without interfering with the other, resolving the contradiction between structural compactness and frequency stability.
2Reliability
If the resonance scanning section area is expanded to position the mirror driving wire outside the actuator part, then the resonance frequency stability is improved, but the optical scanner volume increases
Solution Approach 1:
The patent resolves the spatial conflict by utilizing the planar dimension of the layered structure. Instead of expanding the overall device volume in three dimensions, the patent arranges the first region (piezoelectric film) and second region (mirror driving wire) as adjacent areas within the same planar layer of the resonance scanning section. This allows both components to coexist without increasing the device volume while maintaining frequency stability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration effectively prevents resonance frequency changes and allows for a compact optical scanner with 3D scanning capability, maintaining the variable focus mirror's performance without requiring additional space for detour routing of the mirror driving wire.
Implementation Method 1
the interlayer insulation film of the resonance scanner portion is made from a piezoelectric film
Implementation Method 2
the interlayer insulation film of the mirror driving wire is made from a non-piezoelectric insulation film
Implementation Method 3
a layered body having multiple layers, including a lower conductive layer, a interlayer insulation film and an upper conductive layer
Data Source
AI summary
An optical scanner includes a substrate having a rigid body and a beam, and a layered body having multiple layers, including a lower conductive layer, a interlayer insulation film and an upper conductive layer, the layered body layered on and protruding outward from the rigid body and the beam. The layered body is patterned to form a resonance scanner portion and a vari-focal mirror, the resonance scanner portion (i) made as a part of the layered body and (ii) having an actuator part, and the vari-focal mirror made as a part of the layered body. The layered body including the resonance scanner portion and the vari-focal mirror is patterned to form a mirror driving wire. In such structure, the size of the optical scanner is reduced, and a frequency change of the resonance scanner portion due to the voltage application to the mirror driving wire is suppressed.