Variable Frequency Impedance Matching Using Stored Characteristic Parameters
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Solution Overview
Problem
Existing impedance adjustment apparatuses struggle to perform impedance matching when the output frequency of a high frequency power source is adjusted, particularly in systems with variable frequency, as they rely on pre-measured characteristic parameters for a single frequency, leading to inefficiencies and inaccuracies.
Innovation Solution
An impedance adjustment apparatus that includes a characteristic parameter storage unit for storing parameters across multiple frequency and electrical characteristic adjustment points, a high frequency information detection unit, an output frequency acquisition unit, and an electrical characteristic acquisition unit, allowing for real-time calculation and adjustment of impedance to match the target impedance by adjusting both the variable electrical characteristics and output frequency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If pre-measured characteristic parameters for a single frequency are used, then device complexity is reduced, but impedance matching accuracy deteriorates when output frequency is adjusted
Solution Approach 1:
The patent applies dynamics by transitioning from static single-frequency characteristic parameters to dynamic multi-frequency characteristic parameters. The system now stores and selects characteristic parameters corresponding to different output frequencies, allowing the impedance adjustment apparatus to adapt dynamically when the high frequency power source operates at adjusted frequencies, thereby maintaining measurement precision without excessive complexity increase.
Solution Approach 2:
The patent implements parameter changes by storing characteristic parameters for multiple frequencies and selecting the appropriate parameters based on the current output frequency. This allows the system to change the electrical characteristic parameters dynamically according to frequency adjustments, resolving the contradiction between device simplicity and matching accuracy.
2Adaptability or versatility
If variable frequency system is implemented, then adaptability is improved, but impedance matching reliability deteriorates due to lack of frequency-specific parameters
Solution Approach 1:
The patent applies preliminary action by pre-measuring and storing characteristic parameters for multiple frequencies before actual operation. When the high frequency power source operates at a specific frequency, the system retrieves the pre-prepared characteristic parameters corresponding to that frequency, ensuring reliable impedance matching without requiring real-time measurement, thus maintaining both adaptability and reliability.
3Productivity
If real-time frequency and electrical characteristic adjustment is performed, then power transfer efficiency is improved, but device complexity increases
Solution Approach 1:
The patent implements feedback by detecting the output frequency of the high frequency power source and using this information to select appropriate characteristic parameters from storage. The system then adjusts the electrical characteristics of the variable electrical characteristic element based on the selected parameters, creating a closed-loop control that improves power transfer efficiency while keeping the control system complexity manageable through automated feedback-based parameter selection.
Data Source
AI summary
An impedance adjustment apparatus of the invention performs impedance matching using characteristic parameters, even where a high frequency power source of variable frequencies is used. The apparatus is applicable to a power supply system using a high frequency power source of variable frequencies. Characteristic parameters obtained by targeting a portion of combinations of position information (C) of a variable capacitor and output frequency information (F) of the power source are stored in a memory. A T-parameter acquisition unit acquires characteristic parameters corresponding to (Cnow, Fnow) at the current time. An output reflection coefficient calculation unit calculates a reflection coefficient of an output end. A target information specifying unit, based on the above information and a target input reflection coefficient, specifies target combination information in which a reflection coefficient of an output end approaches the target input reflection coefficient. Impedance matching is performed based on this information.