Variable-Frequency Vibration Damping for Magnetic Force Stages
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Solution Overview
Problem
Existing vibration damping systems, such as those used in photolithography apparatuses, face challenges in effectively reducing vibrations when the natural frequency of the damping apparatus is close to the frequency of the compensation force, leading to increased vibration and performance deterioration. Additionally, these systems are not applicable to structures that generate magnetic flux, such as linear motors.
Innovation Solution
A vibration damping apparatus that includes a mass body, a base, a support member, a housing, an elastic member, and a control unit to adjust the pressure of a fluid in a space, thereby controlling the rigidity and natural frequency of the damping apparatus. This system is designed to support actuators that utilize magnetic forces, allowing for effective vibration reduction across multiple frequencies.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If a dynamic vibration absorber with fixed natural frequency is used, then vibration at a specific frequency can be reduced, but vibration at multiple frequencies cannot be effectively damped
Solution Approach 1:
The patent applies the dynamics principle by making the natural frequency of the vibration absorber variable rather than fixed. The elastic member's rigidity is dynamically adjusted based on the vibration frequency characteristics, allowing the system to adapt to different vibration frequencies and effectively dampen vibrations across multiple frequency ranges.
Solution Approach 2:
The patent changes the physical parameter of the elastic member (rigidity) to adjust the natural frequency of the vibration absorber. By controlling the rigidity of the elastic member, the system can match its natural frequency to the vibration frequency being targeted, thereby optimizing vibration reduction effectiveness for different operating conditions.
2Object-affected harmful factors
If the natural frequency of the damping apparatus is close to the frequency of the compensation force, then resonance may occur and increase vibration, but adjusting the frequency requires changing the apparatus structure
Solution Approach 1:
Instead of modifying the structural configuration, the patent changes the rigidity parameter of the existing elastic member to adjust the natural frequency. This allows frequency tuning without structural redesign, avoiding increased device complexity while maintaining effective vibration control.
Solution Approach 2:
The system dynamically adjusts the elastic member's rigidity to match the compensation force frequency, preventing resonance conditions. This dynamic adaptation allows the apparatus to operate effectively across different frequency conditions without requiring multiple structural configurations.
3Adaptability or versatility
If a magnetic elastomer is used to make the natural frequency variable, then multi-frequency vibration can be damped, but the system cannot support actuators that generate magnetic flux
Solution Approach 1:
The patent replaces the magnetic elastomer-based frequency adjustment mechanism with a mechanical or non-magnetic alternative. By using a different material or mechanism that does not generate magnetic flux, the system maintains frequency variability while being compatible with magnetic actuators such as linear motors.
Solution Approach 2:
The patent introduces an intermediary mechanism or material that couples the vibration absorber to the target structure without using magnetic elastomers. This intermediary allows frequency adjustment through non-magnetic means, enabling the system to work alongside magnetic flux-generating actuators without interference.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The proposed vibration damping apparatus effectively reduces vibrations by adjusting its natural frequency to match the frequency of the compensation force, thereby improving the performance of photolithography and other substrate processing systems. Its ability to support magnetic force actuators expands its applicability to structures that were previously unsuitable.
Implementation Method 1
an elastic member (105) disposed so as to form a space (110) in the housing (103) and configured to apply a force to the support member (104)
Implementation Method 2
a control unit configured to control a pressure of a fluid in the space by supplying the fluid to the space based on a vibration state of the target member
Implementation Method 3
configured to damp a vibration of a target member
Implementation Method 4
by adjusting its natural frequency to match the frequency of the compensation force
Data Source
AI summary
A vibration damping apparatus configured to damp a vibration of a target member includes a mass body, a base disposed on the target member, a support member disposed on the base and configured to support the mass body, a housing disposed on the base so as to surround the support member, an elastic member disposed so as to form a space in the housing and configured to apply a force to the support member, and a control unit configured to control a pressure of a fluid in the space by supplying the fluid to the space based on a vibration state of the target member.