Variable-Height Assembly Chamber for Precise MicroLED Self-Assembly

A fluid medium is introduced as an intermediary between the microLEDs and the substrate. The microLEDs are suspended and transported in the fluid to the target substrate, enabling high-speed parallel assembly. The fluid acts as a carrier that maintains microLED suspension and enables controlled deposition, resolving the contradiction between assembly speed and positioning precision.

Traditional mechanical pick-and-place methods are replaced with a fluid-based transport system. Instead of mechanical grippers and positioning stages, the patent uses fluid flow dynamics to transport and deposit microLEDs. This substitution enables higher productivity while maintaining positioning accuracy through controlled fluid dynamics and substrate interaction.

The chamber partition walls are designed to be movable rather than fixed, allowing dynamic adjustment of chamber regions. The partition walls can change position to accommodate different substrate sizes, assembly configurations, and process requirements. This dynamic structure provides operational flexibility while maintaining a relatively simple overall chamber design.

The movable partition wall system enables the same chamber to perform multiple functions: accommodating different substrate sizes, enabling various assembly configurations, and supporting different process conditions. This multi-functionality achieves high adaptability without requiring multiple specialized chambers, thus avoiding excessive complexity.