Variable Home Position Dispense Pump Reduces Hold-Up Volume
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Solution Overview
Problem
Existing dispense systems in semiconductor manufacturing face issues with hold-up volume, leading to chemical waste, fluid stagnation, and inefficient testing of new chemicals due to excess fluid capacity, which results in waste and inaccurate testing processes.
Innovation Solution
A pumping system with a controller that adjusts the dispense pump to reach a 'home position' corresponding to the required volume for each dispense cycle, reducing the hold-up volume by partially filling the chamber, thereby minimizing unused fluid and optimizing fluid management.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the dispense pump chamber is filled to maximum capacity to ensure sufficient fluid for dispense operations, then the reliability of dispense operations is improved, but the loss of substance (chemical waste) increases due to unused hold-up volume
Solution Approach 1:
The system dynamically adjusts the home position of the dispense pump diaphragm based on the specific dispense volume required. Instead of a fixed maximum fill level, the controller modifies the chamber fill volume to match the actual dispense needs, thereby reducing hold-up volume and chemical waste while ensuring sufficient fluid is always available for reliable dispense operations.
Solution Approach 2:
The invention changes the parameter of chamber fill volume from a fixed maximum value to a variable value determined by the dispense requirements. The controller calculates the appropriate home position based on dispense volume, purging volume, and other parameters, adjusting the diaphragm position to optimize both reliability and reduce chemical waste.
2Productivity
If the dispense pump chamber is filled to maximum capacity to ensure sufficient fluid for dispense operations, then the productivity of dispense operations is improved, but the loss of time increases due to fluid stagnation and flushing requirements
Solution Approach 1:
The system dynamically adjusts the chamber fill volume to match actual dispense requirements, minimizing stagnant fluid volume. This reduces the time required for flushing operations between different chemical dispenses, thereby decreasing loss of time while maintaining productivity through optimized fluid utilization.
3Adaptability or versatility
If the dispense pump chamber is filled to maximum capacity to ensure sufficient fluid for dispense operations, then the adaptability of the system is improved, but the measurement precision decreases due to fluid stagnation effects
Solution Approach 1:
The system dynamically adjusts the home position to optimize fluid utilization, minimizing stagnant volume that could cause gelling, crystallization, or degassing. This maintains measurement precision while preserving adaptability through controller-based adjustment of chamber fill levels for different dispense scenarios.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach reduces chemical waste, minimizes fluid stagnation, and enhances the efficiency of testing new chemicals by ensuring only the necessary volume is used, thereby reducing costs and improving the accuracy of dispense operations.
Implementation Method 1
a dispense pump having a dispense diaphragm movable in a dispense chamber, and a pump controller coupled to the dispense pump. The pump controller, according to one embodiment, is operable to control the dispense pump to move the dispense diaphragm in the dispense chamber to reach a dispense pump home position to partially fill the dispense pump
Data Source
AI summary
Embodiments of the present, invention provide a system and method for reducing the hold-up volume of a pump. More particularly, embodiments of the present invention provide a system and method for determining a home position to reduce hold-up volume at a dispense pump and/or a feed pump. The home position for the diaphragm can be selected such that the volume of the chamber at the dispense pump and/or feed pump contains sufficient fluid to perform the various steps of a dispense cycle while minimizing the hold-up volume. Additionally, the home position of the diaphragm can be selected to optimize the effective range of positive displacement.