Variable Loop Recipe Control for Uniform Layer Deposition
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Solution Overview
Problem
Conventional substrate processing methods require multiple separate recipes to maintain uniform layer thickness, leading to increased energy consumption, processor overhead, and substrate damage due to the need for repeated execution of different recipes for each loop iteration.
Innovation Solution
A variable loop control feature that uses a single recipe with iteration adjustments and multipliers to achieve uniform layer thickness, reducing the need for multiple separate recipes by generating an offset table to adjust manufacturing parameters across iterations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If multiple separate recipes are used to maintain uniform layer thickness, then layer uniformity is improved, but energy consumption increases
Solution Approach 1:
The patent combines multiple separate recipes into a single unified recipe that uses iteration adjustments and multipliers to achieve the same layer uniformity. Instead of executing multiple distinct recipes, the system executes one recipe with dynamic parameter modifications across iterations, merging the functionality of multiple recipes into one while reducing energy consumption.
Solution Approach 2:
The patent employs parameter changes through iteration adjustments and multipliers that modify process parameters dynamically during recipe execution. Each iteration applies calculated adjustments to parameters such as deposition time, temperature, or flow rates based on feedback from previous iterations, enabling uniform layer thickness without requiring multiple separate recipes.
2Manufacturing precision
If multiple separate recipes are used to maintain uniform layer thickness, then layer uniformity is improved, but processor overhead increases
Solution Approach 1:
The patent merges multiple recipe execution contexts into a single recipe execution with iteration-based parameter modification. The processor manages one recipe loop instead of switching between multiple recipes, reducing context switching overhead and simplifying the control logic while maintaining the ability to adjust parameters for uniformity.
Solution Approach 2:
The patent introduces dynamic parameter adjustment within a single recipe through iteration adjustments and multipliers. Instead of static multiple recipes, the system dynamically modifies parameters during execution based on iteration number and feedback, reducing the need for multiple pre-configured recipes and lowering processor overhead for recipe management.
3Manufacturing precision
If multiple separate recipes are used to maintain uniform layer thickness, then layer uniformity is improved, but substrate damage increases
Solution Approach 1:
The patent combines multiple recipe executions into a single continuous execution with iteration adjustments. This reduces the number of times substrates must be loaded, unloaded, and re-positioned between recipe executions, thereby reducing mechanical handling damage while maintaining layer uniformity through parameter adjustments within the single recipe loop.
Solution Approach 2:
The patent enables continuous processing within a single recipe execution rather than interrupting for multiple separate recipe loads. The iteration-based parameter adjustment allows the process to continue uninterrupted with dynamic modifications, reducing substrate handling cycles and associated damage risks while maintaining uniformity.
4Manufacturing precision
If multiple separate recipes are used to maintain uniform layer thickness, then layer uniformity is improved, but bandwidth usage increases
Solution Approach 1:
The patent merges multiple recipe data structures into a single recipe with iteration-based parameters. This reduces the bandwidth required to transfer and store recipe data, as well as the communication overhead between control systems, while maintaining uniformity through dynamic parameter adjustment during execution rather than through multiple separate recipe definitions.
5Manufacturing precision
If multiple separate recipes are used to maintain uniform layer thickness, then layer uniformity is improved, but personnel time increases
Solution Approach 1:
The patent combines multiple separate recipe creation, validation, and maintenance tasks into a single recipe framework with automatic iteration adjustments. This reduces personnel time required for recipe management, as the system automatically calculates and applies parameter adjustments across iterations rather than requiring manual creation and coordination of multiple separate recipes.
Solution Approach 2:
The patent implements self-service through automatic iteration adjustments and multipliers that the system calculates and applies without manual intervention. The system autonomously modifies parameters across iterations based on feedback and predefined algorithms, reducing personnel time for recipe tuning and maintenance while maintaining layer uniformity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach significantly reduces energy consumption, bandwidth usage, and personnel time while improving substrate uniformity and reducing damage to both substrates and processing systems by allowing a single recipe to be used across multiple iterations with adjusted parameters.
Implementation Method 1
A variable loop control feature for substrate processing... identifying a recipe for depositing a plurality of layers on a substrate in a processing chamber
Implementation Method 2
A variable loop control feature for substrate processing... identifying a recipe for depositing a plurality of layers on a substrate in a processing chamber
Data Source
AI summary
A method includes identifying a recipe for depositing layers on a substrate in a processing chamber of a substrate processing system. The recipe comprises iterations of a set of one or more processes, and wherein each iteration of the iterations is for depositing at least one layer of the layers. The method further includes determining changes to parameters for depositing the at least one layer on the substrate. Each of the changes corresponds to a respective iteration of the iterations and is associated with a relative position of a corresponding layer. The layers are to be deposited on one or more substrates based on the recipe and the changes.