Variable Lot Size Load Port Assembly for FOUP Handling
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Solution Overview
Problem
Conventional load ports are limited to accommodating only specific sizes of Front Opening Unified Pods (FOUPs), which restricts their versatility in handling wafers of varying capacities, leading to inefficiencies in wafer transfer and potential contamination due to fixed component configurations.
Innovation Solution
A variable lot size load port assembly that includes a tool interface, a port door, a latch key, an advance plate, and an elevator, allowing for the accommodation of multiple FOUP sizes by adjusting the elevation of the advance plate and using interchangeable seal plates to form proximity seals, ensuring proper alignment and containment of wafers regardless of size.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If conventional load ports use fixed component configurations, then they can accommodate specific FOUP sizes, but they cannot handle wafers of varying capacities
Solution Approach 1:
The load port employs an adjustable advance plate elevation mechanism that can dynamically change its vertical position to accommodate different FOUP sizes. The advance plate is mounted on a vertically adjustable support structure, allowing the system to adapt its configuration rather than being fixed for a single FOUP size.
Solution Approach 2:
The invention changes the vertical position parameter of the advance plate to match different FOUP sizes. By adjusting the elevation of the advance plate, the system can properly align with various FOUP capacities, enabling versatile handling without requiring multiple fixed configurations.
2Adaptability or versatility
If the advance plate is fixed in position, then the structure is simple, but it cannot align with FOUPs of different capacities
Solution Approach 1:
The advance plate support structure includes vertical adjustment capability, transforming a static component into a dynamic one that can adapt its position. This allows the advance plate to align with different FOUP capacities while maintaining structural integrity.
Solution Approach 2:
The adjustable advance plate mechanism serves multiple functions: it can be positioned to accommodate different FOUP sizes, maintain proper alignment for wafer transfer, and work with various latch key configurations. This multi-functionality reduces the need for multiple specialized components.
3Adaptability or versatility
If conventional load ports use fixed aperture sizes, then they can seal with specific FOUP flanges, but they cannot form proximity seals with varying FOUP sizes
Solution Approach 1:
The sealing function is segmented into interchangeable seal plates that can be independently selected and mounted. Each seal plate is designed with specific aperture dimensions to match particular FOUP sizes, allowing the system to properly seal with various FOUP flanges by selecting the appropriate plate.
Solution Approach 2:
The aperture size parameter of the seal plate is changed by selecting different plates with varying dimensions. This allows the load port to form proper proximity seals with FOUPs of different sizes by matching the aperture dimensions to the corresponding FOUP flange dimensions.
4Productivity
If the load port is designed for a single FOUP size, then the structure is simplified, but wafer transfer efficiency decreases when handling varying capacities
Solution Approach 1:
The load port uses dynamically adjustable components including the vertically positionable advance plate and interchangeable seal plates, allowing rapid reconfiguration for different FOUP sizes. This maintains optimal alignment and sealing for each FOUP type, ensuring efficient wafer transfer regardless of capacity variations.
Solution Approach 2:
The system changes key parameters such as advance plate elevation and seal plate aperture size to match different FOUP capacities. This parameter adjustment ensures proper positioning and sealing for each FOUP type, maximizing wafer transfer efficiency without requiring a completely different load port design.
Data Source
AI summary
A variable lot size load port assembly is described having a tool interface, a port door, a latch key, an advance plate, and an elevator. The tool interface extends generally in a vertical dimension and has an aperture. The port door has a closed position wherein the port door at least partially occludes the aperture. The latch key extends from the port door and is configured to mate with a latch key receptacle of a door of a front opening unified pod (FOUP). The advance plate is configured to support a front opening unified pod (FOUP) and translate between a retracted position and an advanced position. The elevator raises and lowers the advance plate to bring the latch key receptacle of the door of the FOUP into alignment with the latch key of the port door.