Variable Mesh MEMS Mirrors for Optical Circuit Switches
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Solution Overview
Problem
Optical circuit switches (OCS) require improved mechanical components to enhance stiffness and reduce moment of inertia for efficient light routing, as existing MEMS mirror arrays face deformation and vibration issues due to uniform mesh or solid layer support.
Innovation Solution
A variable mesh pattern on the backside surface of MEMS mirrors is implemented, with ribs tapering from a wider center to a narrower perimeter, distributing mass more concentratedly towards the center, thereby increasing stiffness while decreasing moment of inertia.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Strength
If a uniform mesh or solid layer is used to support MEMS mirrors, then the structure provides adequate support coverage, but the mirrors experience deformation and vibration due to insufficient stiffness and excessive moment of inertia
Solution Approach 1:
The patent applies local quality by varying the rib width in the mesh pattern - ribs are wider near the center of the mirror where stiffness is most needed, and narrower toward the perimeter. This non-uniform distribution optimizes the stiffness-to-mass ratio by concentrating material where it provides the greatest structural benefit, thereby increasing stiffness while minimizing moment of inertia.
Solution Approach 2:
The patent changes the geometric parameters of the mesh pattern, specifically the rib width, as a function of position across the mirror surface. By transitioning from a uniform mesh to a variable mesh where rib dimensions change radially, the structure achieves optimized mechanical properties - higher stiffness near the rotation axis and reduced moment of inertia overall.
2Reliability
If existing MEMS mirror arrays are used, then the system can perform basic light routing, but deformation and vibration issues occur that reduce rotational accuracy and resonance frequency
Solution Approach 1:
By concentrating mass and structural support near the center of the mirror through wider ribs in the variable mesh pattern, the patent enhances local stiffness at the rotation axis. This improves rotational accuracy by minimizing deformation during rotation while the tapered rib structure reduces overall moment of inertia to decrease vibration and increase resonance frequency.
Data Source
AI summary
The present disclosure provides a component, such as a MEMS mirror or other generally disc-shaped component, having a variable mesh pattern across a backside surface thereof. The variable mesh includes ribs having a first thickness near a center portion or axis of rotation of the components, and a second narrower thickness at portions farther from the center or axis of rotation.