Variable Molding Mask for Non-Integer Line Width Patterns
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Solution Overview
Problem
Conventional maskless-type exposure apparatuses face difficulties in forming patterns with line widths that are not integer multiples of the size of modulation elements, as the positions and sizes of modulation elements, such as mirrors, are fixed, limiting the precision and accuracy of pattern formation.
Innovation Solution
A pattern formation method using a variable molding mask with digitally controlled micro mirrors that spatially modulate illumination light, allowing for the adjustment of the number and position of modulation elements to form patterns with desired line widths by combining different configurations of micro mirrors, enabling the creation of patterns with non-integer multiples of the modulation element size.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If fixed modulation elements (mirrors) are used in a maskless exposure apparatus, then the device complexity is reduced and ease of manufacture is improved, but the manufacturing precision of patterns with non-integer line widths deteriorates
Solution Approach 1:
The patent applies the dynamics principle by making the modulation elements movable rather than fixed. The mirrors can be dynamically repositioned to different locations on the variable molding mask, enabling the formation of patterns with various line widths including non-integer multiples of the original element size. This dynamic reconfiguration capability resolves the contradiction by maintaining ease of manufacture through a single reusable mask while achieving high manufacturing precision for arbitrary pattern dimensions.
Solution Approach 2:
The patent applies parameter changes by varying the position and configuration of modulation elements rather than changing the physical mask structure. By controlling the spatial arrangement of movable mirrors, the system can generate patterns with different line widths and geometries, transforming a fixed-parameter system into a variable-parameter system that achieves high precision without increasing manufacturing complexity.
2Device complexity
If the number and positions of modulation elements are fixed on the variable molding mask, then the device complexity is reduced, but the adaptability to form patterns with various line widths deteriorates
Solution Approach 1:
The modulation elements are designed to be dynamically reconfigurable rather than statically fixed. Each mirror can be independently positioned to different locations on the mask plane, allowing the system to adapt to various pattern requirements. This dynamic capability provides high adaptability for forming patterns with different line widths while maintaining relatively low device complexity through software-controlled positioning rather than multiple physical masks.
Solution Approach 2:
The variable molding mask with movable modulation elements serves multiple functions: it can form patterns with integer and non-integer line widths, accommodate different pattern geometries, and replace multiple fixed masks. This multi-functionality achieves high adaptability while avoiding the complexity of managing multiple separate masks or mask sets.
3Ease of manufacture
If conventional maskless exposure apparatus with fixed modulation elements is used, then cost reduction is achieved by eliminating masks, but the manufacturing precision for non-integer line width patterns deteriorates
Solution Approach 1:
The patent maintains the cost advantage of maskless exposure by using a single reusable variable molding mask with movable elements rather than requiring multiple physical masks. The dynamic repositioning capability enables precise formation of non-integer line width patterns without the need for expensive custom masks, thus achieving both cost reduction and high manufacturing precision simultaneously.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach allows for precise and accurate formation of patterns with desired line widths at specific positions, improving the resolution and precision beyond the limitations of fixed modulation element sizes, while also reducing costs by eliminating the need for expensive masks.
Implementation Method 1
a variable molding mask with a plurality of modulation elements, which spatially individually modulate at least one of amplitude, phases and polarization of illumination lights
Data Source
AI summary
A drive system determines a combination of basic patterns (type of basic patterns to be generated and the number of pulses of each basic pattern) based on design data of patterns and pattern combination information stored in a memory. Then, based on the determined result, each micro mirror of a variable molding mask is individually controlled such that a plurality of basic patterns are sequentially generated according to each of the number of pulses, and each basic pattern generated by the variable molding mask is sequentially image-formed on a plate via a projection optical system. Thus, a pattern with a desired line width corresponding to the design data is formed at a desired position on the object with a good accuracy.